Igice cya 1 cyo Gushyiramo umwuka w'ubushyuhe mu maraso

Gukuraho umwuka wa Chemical Vapor Deposition (CVD). Nk'uko izina ribisobanura, ni uburyo bukoresha imyuka itera umwuka kugira ngo ikore filime zikomeye binyuze mu buryo bwa atome na molecules. Bitandukanye na PVD, uburyo bwa CVD bukorerwa ahanini mu kirere gifite umuvuduko mwinshi (vacuum cleaner), aho umuvuduko mwinshi ukoreshwa cyane cyane mu kongera umuvuduko wo gushyiramo filime. Gushyiramo umwuka wa Chemical Vapor Deposition bishobora gushyirwa mu byiciro bya CVD rusange (izwi kandi nka CVD y'ubushyuhe) n'uburyo plasma-enhanced Chemical Vapor Deposition (Plasma-Enhanced Chemical Vapor Deposition. PECVD) hakurikijwe niba plasma ifite uruhare mu gushyiramo umwuka. Iki gice cyibanda ku ikoranabuhanga rya PECVD harimo uburyo bwa PECVD n'ibikoresho bya PECVD bikunze gukoreshwa n'amahame ngiro.

Gushyira umwuka w’ubushyuhe mu buryo bwa plasma ni uburyo bwo gushyira umwuka w’ubushyuhe mu buryo bwa thin-film bukoresha plasma isohora urumuri kugira ngo igire ingaruka ku buryo bwo gushyira umwuka mu gihe igikorwa cyo gushyira umwuka w’ubushyuhe mu buryo bwa shimi kirimo kuba. Muri ubu buryo, ikoranabuhanga risanzwe rya CVD rishingira ku bushyuhe bwinshi bwa substrate kugira ngo rimenye ingaruka za shimi hagati y’ibintu bigize gaze no gushyiramo uduce duto, bityo bikaba byakwitwa ikoranabuhanga rya CVD rishyushye.

Mu gikoresho cya PECVD, umuvuduko wa gaze ukora ni hafi 5~500 Pa, kandi ubucucike bwa electron na ions bushobora kugera kuri 109~1012/cm3, mu gihe ingufu mpuzandengo za electron zishobora kugera kuri 1~10 eV. Igitandukanya uburyo bwa PECVD n'ubundi buryo bwa CVD ni uko plasma irimo umubare munini wa electron zifite ingufu nyinshi, zishobora gutanga ingufu zikenewe mu gikorwa cyo gushyira umwuka mu kirere. Guhurirana kwa electron na molecules za gaze bishobora gutuma molekile za gaze zisenyuka, zikora chemotherapy, zikora amatsinda ya chemical akorana cyane, bityo bigabanyiriza cyane ubushyuhe bwa CVD thin film, bigatuma bishoboka ko inzira ya CVD ikorwa, mbere na mbere igomba gukorwa ku bushyuhe bwinshi, ku bushyuhe buke. Akamaro ko gushyiramo filime thin film mu bushyuhe buke ni uko bishobora kwirinda gukwirakwira bitari ngombwa no gukorana na chemical hagati ya filime na substrate, impinduka mu miterere no kwangirika kwa filime cyangwa substrate, hamwe n'ubushyuhe bwinshi muri filime no muri substrate.

–Iyi nkuru yasohotse nauruganda rukora imashini zikora imashini zikoresha umwuka ushyushyeGuangdong Zhenhua