Mokuna 1 o ka hoʻokahe ʻana o ka mahu kemika i hoʻonui ʻia i ka plasma

ʻO ka Chemical Vapor Deposition (CVD). E like me ka inoa e hōʻike nei, he ʻenehana ia e hoʻohana ana i nā mea hana mua o ke kinoea e hana i nā kiʻiʻoniʻoni paʻa ma o nā hopena kemika atomika a me intermolecular. ʻAʻole e like me PVD, hana nui ʻia ke kaʻina hana CVD i kahi kaiapuni kiʻekiʻe (vacuum haʻahaʻa), me ke kaomi kiʻekiʻe e hoʻohana nui ʻia e hoʻonui i ka helu deposition o ke kiʻiʻoniʻoni. Hiki ke hoʻokaʻawale ʻia ka Chemical vapor deposition i loko o CVD laulā (ʻike ʻia hoʻi ʻo thermal CVD) a me ka plasma-enhanced chemical vapor deposition (Plasma-Enhanced Chemical Vapor Deposition. PECVD) e like me ke komo ʻana o ka plasma i ke kaʻina deposition. Ke nānā nei kēia ʻāpana i ka ʻenehana PECVD e pili ana i ke kaʻina hana PECVD a me nā lako PECVD i hoʻohana pinepine ʻia a me ke kumu hana.

ʻO ka hoʻokaʻawale ʻana o ka mahu kemika i hoʻonui ʻia e ka plasma he ʻenehana hoʻokaʻawale ʻana o ka mahu kemika ʻili lahilahi e hoʻohana ana i ka plasma hoʻokuʻu ʻālohilohi e hoʻokau i kahi mana ma ke kaʻina hana hoʻokaʻawale ʻoiai ke hana ʻia nei ke kaʻina hana hoʻokaʻawale ʻana o ka mahu kemika haʻahaʻa. Ma kēia ʻano, hilinaʻi ka ʻenehana CVD maʻamau i nā mahana substrate kiʻekiʻe e hoʻomaopopo i ka hopena kemika ma waena o nā mea kinoea a me ka hoʻokaʻawale ʻana o nā ʻili lahilahi, a no laila hiki ke kapa ʻia ʻo ka ʻenehana CVD thermal.

I loko o ka hāmeʻa PECVD, ʻo ke kaomi kinoea hana ma kahi o 5 ~ 500 Pa, a hiki i ka nui o nā electrons a me nā ions ke hiki i 109 ~ 1012 / cm3, ʻoiai ʻo ka ikehu awelika o nā electrons hiki ke hiki i 1 ~ 10 eV. ʻO ka mea e hoʻokaʻawale ai i ke ʻano PECVD mai nā ʻano CVD ʻē aʻe, ʻo ia ka nui o nā electrons ikehu kiʻekiʻe i loko o ka plasma, hiki ke hāʻawi i ka ikehu hoʻāla e pono ai no ke kaʻina hana hoʻoheheʻe mahu kemika. Hiki i ke kuʻi ʻana o nā electrons a me nā molekala gas-phase ke hoʻolaha i nā kaʻina hana decomposition, chemosynthesis, excitation a me ionization o nā molekala gas, e hana ana i nā hui kemika reactive kiʻekiʻe, a pēlā e hōʻemi nui ai i ka pae mahana o ka waiho ʻana o ka ʻili lahilahi CVD, e hiki ai ke hoʻokō i ke kaʻina hana CVD, ka mea i koi mua ʻia e hana ʻia ma nā mahana kiʻekiʻe, ma nā mahana haʻahaʻa. ʻO ka pōmaikaʻi o ka waiho ʻana o ka ʻili lahilahi haʻahaʻa, hiki iā ia ke pale aku i ka hoʻolaha pono ʻole a me ka hopena kemika ma waena o ka ʻili a me ka substrate, nā loli kūkulu a me ka hōʻino ʻana o ka ʻili a i ʻole ka mea substrate, a me nā pilikia wela nui i loko o ka ʻili a me ka substrate.

–Ua hoʻokuʻu ʻia kēia ʻatikala emea hana mīkini uhi hakahakaGuangdong Zhenhua