Amasu avamile okufaka izembozo eziqinile

1. Ubuchwepheshe be-CVD yokushisa

Izimbozo eziqinile ikakhulukazi ziyimbozo zensimbi ze-ceramic (i-TiN, njll.), ezakhiwa ukusabela kwensimbi ekumbozweni kanye ne-reactive gasification. Ekuqaleni, ubuchwepheshe be-thermal CVD basetshenziswa ukuhlinzeka ngamandla okusebenza kokusabela kwe-Combination ngamandla okushisa ekushiseni okuphezulu okungu-1000 ℃. Lokhu kushisa kufaneleka kuphela ekufakeni i-TiN nezinye izimbozo eziqinile kumathuluzi e-carbide aqinisiwe. Kuze kube manje, kusewubuchwepheshe obubalulekile bokufaka izimbozo ze-TiN – Al2O3 ezihlanganisiwe emakhanda amathuluzi e-carbide aqinisiwe.

1. Ukugqoka kwe-ion ye-cathode engenalutho kanye nokugqoka kwe-ion ye-arc ye-wire eshisayo

Ngawo-1980, i-hollow cathode ion coating kanye ne-hot wire arc ion coating kwakusetshenziswa ukufaka amathuluzi okusika ambozwe nge-coating. Zombili lezi zobuchwepheshe ze-ion coating ziwubuchwepheshe be-arc discharge ion coating, ngesilinganiso se-ionization sensimbi esifinyelela ku-20% ~ 40%.

1. Ukugqoka kwe-arc ion ye-cathode

Ukuvela kwe-cathodic arc ion cathodic kuholele ekuthuthukisweni kobuchwepheshe bokufaka izembozo eziqinile ezikhumbeni. Izinga le-ionization lezembozo ze-cathodic arc ion lingu-60% ~ 90%, okuvumela inani elikhulu lama-ion ensimbi nama-ion egesi okusabela ukuthi afinyelele phezulu kwento yokusebenza futhi aqhubeke nokusebenza okuphezulu, okuholela ekubekweni kwe-reaction kanye nokwakheka kwezembozo eziqinile njenge-TiN. Njengamanje, ubuchwepheshe bezembozo ze-cathodic arc ion busetshenziswa kakhulu ukufaka izembozo eziqinile ezikhumbeni.

Umthombo we-cathode arc ungumthombo wokuhwamuka kwesimo esiqinile ongenalo ichibi elincibilikisiwe eliqinile, futhi indawo yomthombo we-arc ingabekwa ngokungahleliwe, kuthuthukiswe izinga lokusetshenziswa kwesikhala segumbi lokumboza futhi kwandiswe umthamo wokulayisha wesithando. Izimo zemithombo ye-cathode arc zifaka imithombo emincane ye-cathode arc eyindilinga, imithombo ye-columnar arc, kanye nemithombo emikhulu ye-arc eyisicaba engunxande. Izingxenye ezahlukene zemithombo emincane ye-arc, imithombo ye-columnar arc, kanye nemithombo emikhulu ye-arc zingahlelwa ngokwehlukana ukuze kufakwe amafilimu anezingqimba eziningi namafilimu e-nano multilayer. Okwamanje, ngenxa yesilinganiso esiphakeme se-ionization yensimbi se-cathodic arc ion coating, ama-ion ensimbi angamunca amagesi amaningi okusabela, okuholela ebangeni lenqubo ebanzi kanye nokusebenza okulula ukuthola izingqimba eziqinile ezinhle kakhulu. Kodwa-ke, kunezinhlayiya ezincane esakhiweni esincane sengqimba yokumboza etholwe yi-cathodic arc ion coating. Eminyakeni yamuva nje, kuye kwavela ubuchwepheshe obusha obuningi bokulungisa isakhiwo sengqimba yefilimu, okuthuthukise ikhwalithi yefilimu yokumboza i-arc ion.