Dabaru na al'ada don ajiye rufin tauri

1. Fasahar CVD mai zafi

Rufin da ke da tauri galibi su ne rufin ƙarfe na yumbu (TiN, da sauransu), waɗanda ake samu ta hanyar amsawar ƙarfe a cikin rufi da kuma gasification mai amsawa. Da farko, an yi amfani da fasahar CVD ta thermal don samar da kuzarin kunnawa na amsawar haɗuwa ta hanyar makamashin zafi a babban zafin jiki na 1000 ℃. Wannan zafin jiki ya dace ne kawai don ajiye TiN da sauran rufin tauri akan kayan aikin carbide mai siminti. Zuwa yanzu, har yanzu fasaha ce mai mahimmanci don ajiye rufin TiN - Al2O3 akan kan kayan aikin carbide mai siminti.

1. Rufin ion mai katode mai rami da kuma murfin ion mai zafi na waya mai zafi

A shekarun 1980, an yi amfani da murfin ion mai kauri da kuma murfin ion mai zafi na waya don ajiye kayan aikin yankewa masu rufi. Duk waɗannan fasahar rufe ion fasahar rufe ion ce ta arc discharge ion, tare da ƙimar ionization na ƙarfe har zuwa 20% zuwa 40%.

1. Rufin ion na Cathode arc

Bayyanar cathodic arc ion cating ya haifar da ci gaban fasahar sanya rufin tauri a kan molds. Yawan ionization na murfin cathodic arc ion shine 60% ~ 90%, wanda ke ba da damar adadi mai yawa na ions na ƙarfe da ions na iskar gas su isa saman aikin kuma har yanzu suna ci gaba da aiki mai yawa, wanda ke haifar da ajiyar amsawa da samuwar rufin tauri kamar TiN. A halin yanzu, fasahar rufewar cathodic arc ion galibi ana amfani da ita don sanya rufin tauri a kan molds.

Tushen baka na cathode tushen ƙafewa ne mai ƙarfi wanda ba shi da tafki mai narkewa, kuma ana iya sanya matsayin tushen baka ba tare da wani tsari ba, yana inganta ƙimar amfani da sararin samaniya na ɗakin shafa da kuma ƙara ƙarfin ɗaukar wutar lantarki. Siffofin tushen baka na cathode sun haɗa da ƙananan tushen baka na cathode mai zagaye, tushen baka na columnar, da kuma tushen baka mai faɗi mai faɗi. Ana iya shirya sassa daban-daban na ƙananan tushen baka, tushen baka na columnar, da manyan tushen baka daban-daban don adana fina-finai masu faɗi da fina-finan nano mai faɗi da yawa. A halin yanzu, saboda yawan ionization na ƙarfe na murfin ion na cathodic arc, ions na ƙarfe na iya sha ƙarin iskar gas mai amsawa, wanda ke haifar da kewayon tsari mai faɗi da kuma aiki mai sauƙi don samun kyakkyawan rufin tauri. Duk da haka, akwai ɗigon ruwa mai kauri a cikin ƙaramin tsarin Layer na Layer na shafa da aka samu ta hanyar murfin ion na cathodic arc. A cikin 'yan shekarun nan, sabbin fasahohi da yawa sun fito don inganta tsarin Layer na fim ɗin, wanda ya inganta ingancin fim ɗin murfin ion na arc.