Nā ʻano hana maʻamau no ka waiho ʻana i nā uhi paʻakikī

1. ʻenehana CVD wela

ʻO nā uhi paʻakikī ka hapa nui o nā uhi keramika metala (TiN, a pēlā aku), i hana ʻia e ka hopena o ka metala i loko o ka uhi a me ka gasification reactive. I ka wā mua, ua hoʻohana ʻia ka ʻenehana CVD thermal e hāʻawi i ka ikehu hoʻāla o ka hopena hui pū ʻana e ka ikehu thermal ma kahi mahana kiʻekiʻe o 1000 ℃. He kūpono wale kēia mahana no ka waiho ʻana iā TiN a me nā uhi paʻakikī ʻē aʻe ma nā mea hana carbide cemented. A hiki i kēia manawa, he ʻenehana koʻikoʻi nō ia no ka waiho ʻana i nā uhi hui TiN - Al2O3 ma nā poʻo mea hana carbide cemented.

1. Uhi ʻona cathode hakahaka a me ka uhi ʻona arc uea wela

I nā makahiki 1980, ua hoʻohana ʻia ka uhi ʻana o ka ion cathode hollow a me ka uhi ʻana o ka ion arc uea wela e waiho i nā mea ʻoki i uhi ʻia. ʻO kēia mau ʻenehana uhi ion ʻelua he mau ʻenehana uhi ion hoʻokuʻu arc, me ka helu ionization metala a hiki i ka 20% ~ 40%.

1. Uhi ʻana ion arc cathode

ʻO ka puka ʻana mai o ka cathodic arc ion cathodic i alakaʻi i ka hoʻomohala ʻana o ka ʻenehana o ke kau ʻana i nā uhi paʻakikī ma luna o nā ʻōmole. ʻO ka helu ionization o ka uhi ʻana o ka ion arc cathodic he 60% ~ 90%, e ʻae ana i ka nui o nā ion metala a me nā ion kinoea pane e hiki i ka ʻili o ka workpiece a mālama mau i ka hana kiʻekiʻe, e hopena ana i ka waiho ʻana o ka pane a me ka hoʻokumu ʻana o nā uhi paʻakikī e like me TiN. I kēia manawa, hoʻohana nui ʻia ka ʻenehana uhi ʻana o ka ion arc cathodic e waiho i nā uhi paʻakikī ma luna o nā ʻōmole.

ʻO ke kumu arc cathode kahi kumu hoʻoheheʻe paʻa me ka ʻole o kahi waihona hoʻoheheʻe paʻa, a hiki ke kau ʻia ke kūlana kumu arc ma ke ʻano kūpono ʻole, e hoʻomaikaʻi ana i ka nui o ka hoʻohana ʻana i ka wahi o ka lumi uhi a hoʻonui i ka hiki ke hoʻouka i ka umu. ʻO nā ʻano o nā kumu arc cathode e komo pū me nā kumu arc cathode poepoe liʻiliʻi, nā kumu arc columnar, a me nā kumu arc nui pālahalaha rectangular. Hiki ke hoʻonohonoho ʻokoʻa ʻia nā ʻāpana like ʻole o nā kumu arc liʻiliʻi, nā kumu arc columnar, a me nā kumu arc nui e waiho i nā kiʻiʻoniʻoni multi-layer a me nā kiʻiʻoniʻoni nano multilayer. I kēia manawa, ma muli o ke kiʻekiʻe o ka ionization metala o ka uhi ion arc cathodic, hiki i nā ion metala ke omo i nā kinoea hopena hou aʻe, e hopena ana i kahi ākea ākea a me ka hana maʻalahi e loaʻa ai nā uhi paʻakikī maikaʻi loa. Eia nō naʻe, aia nā kulu coarse i loko o ka micro-structure o ka papa uhi i loaʻa e ka uhi ion arc cathodic. I nā makahiki i hala iho nei, ua puka mai nā ʻenehana hou he nui e hoʻomaʻemaʻe i ke ʻano o ka papa kiʻiʻoniʻoni, kahi i hoʻomaikaʻi ai i ka maikaʻi o ke kiʻiʻoniʻoni uhi ion arc.