Farsamooyinka caadiga ah ee lagu shubo dahaarka adag

1. Tiknoolajiyadda kuleylka CVD

Dahaarka adag badanaa waa dahaarka dhoobada birta ah (TiN, iwm.), kuwaas oo ay sameeyaan falgalka birta ee dahaarka iyo gaaska falgalka ah. Markii hore, tiknoolajiyada CVD ee kuleylka waxaa loo isticmaalay in lagu bixiyo tamarta kicinta ee falgalka isku-dhafka ah ee tamarta kulaylka heerkul sare oo ah 1000 ℃. Heerkulkani wuxuu ku habboon yahay oo keliya in TiN iyo dahaarka kale ee adag lagu shubo qalabka carbide ee sibidhka ah. Ilaa hadda, wali waa tignoolajiyad muhiim ah oo lagu shubo dahaarka isku-dhafka ah ee TiN - Al2O3 ee madaxyada qalabka carbide ee sibidhka ah.

1. Dahaarka ion-ka cathode-ka ee godka ah iyo dahaarka ion-ka ee fiilada kulul

Sannadihii 1980-meeyadii, dahaarka ion-ka cathode-ka ee godan iyo dahaarka ion-ka ee fiilada kulul ayaa loo isticmaali jiray in lagu kaydiyo qalabka jarista dahaarka leh. Labadan tignoolajiyadood ee dahaarka ion-ka waa tignoolajiyadaha dahaarka ion-ka ee dahaarka arc-ka, iyadoo heerka ionization-ka birta ah uu gaarayo ilaa 20% ~ 40%.

1. Dahaarka arc ion ee Cathode

Soo ifbixidda cathodic arc ion cating ayaa horseeday horumarinta tiknoolajiyada lagu shubo dahaarka adag ee caaryada. Heerka ionization ee dahaarka cathodic arc ion waa 60% ~ 90%, taasoo u oggolaanaysa tiro badan oo ah ion bir ah iyo ion gaaska falcelinta inay gaaraan dusha sare ee shaqada oo ay weli sii wadaan firfircooni sare, taasoo keentay in falcelinta la dhigo oo la sameeyo dahaarka adag sida TiN. Waqtigan xaadirka ah, tiknoolajiyada dahaarka cathodic arc ion waxaa inta badan loo isticmaalaa in lagu shubo dahaarka adag ee caaryada.

Isha qaansada cathode waa il uumi-baxa oo adag oo aan lahayn barkad dhalaalaysa oo go'an, booska isha qaansadana si aan kala sooc lahayn ayaa loo dhigi karaa, taasoo hagaajinaysa heerka isticmaalka booska ee qolka dahaarka iyo kordhinta awoodda rarista foornada. Qaababka ilaha qaansada cathode waxaa ka mid ah ilaha qaansada cathode ee wareegsan ee yar yar, ilaha qaansada tiirarka, iyo ilaha qaansada ee waaweyn ee afargeeslaha ah. Qaybaha kala duwan ee ilaha qaansada yar yar, ilaha qaansada tiirarka, iyo ilaha qaansada waaweyn ayaa si gaar ah loo habeyn karaa si loo dhigo filimada lakabka badan leh iyo filimada lakabka badan leh ee nano. Dhanka kale, sababtoo ah heerka ionization birta sare ee dahaarka ion-ka cathodic, ion-yada birta waxay nuugi karaan gaasas badan oo falcelin ah, taasoo keenta kala duwanaansho geeddi-socod ballaaran iyo hawlgal fudud si loo helo dahaadh adag oo aad u fiican. Si kastaba ha ahaatee, waxaa jira dhibco qallafsan oo ku jira qaab-dhismeedka yar ee lakabka dahaarka ee laga helo dahaarka ion-ka cathodic. Sannadihii ugu dambeeyay, teknoolojiyado badan oo cusub ayaa soo baxay si loo hagaajiyo qaab-dhismeedka lakabka filimka, kaas oo hagaajiyay tayada filimka dahaarka ion-ka arc.