Uburyo busanzwe bwo gushyiramo irangi rikomeye

1. Ikoranabuhanga rya CVD rikoresha ubushyuhe

Ingufu zikomeye zikunze kuba ari inyufu z’icyuma (TiN, nibindi), zikorwa n’uburyo icyuma gikoreshwa mu gusiga no gukwirakwiza umwuka. Mbere na mbere, ikoranabuhanga rya CVD rikoresha ubushyuhe ryakoreshejwe mu gutanga ingufu zo gukora inyufu z’ingufu zivanze n’ubushyuhe ku bushyuhe bwinshi bwa 1000 ℃. Ubu bushyuhe bukwiriye gusa gushyira TiN n’izindi ngufu zikomeye ku bikoresho bya karubide bikozwe muri sima. Kugeza ubu, iracyari ikoranabuhanga ry’ingenzi mu gushyiramo TiN – Al2O3 ku mitwe y’ibikoresho bya karubide bikozwe muri sima.

1. Irangi rya cathode ion ridafite aho rihuriye n'irirangi rya arc ion rishyushye

Mu myaka ya 1980, ibikoresho byo gukata hakoreshejwe imashini zikonjesha zikoresha ...

1. Gutwikiriza iyoni ya arc ya cathode

Kugaragara kwa cathodic arc ion cathodic byatumye habaho iterambere ry'ikoranabuhanga ryo gushyira irangi rikomeye ku bimera. Igipimo cya ionization cya cathodic arc ion coating ni 60% ~ 90%, bigatuma umubare munini wa ions z'icyuma na ions za gaze reaction bigera ku buso bw'igikorwa kandi bigakomeza gukora cyane, bigatuma reaction ishyirwa no gukorwa kwa irangi rikomeye nka TiN. Muri iki gihe, ikoranabuhanga rya cathodic arc ion coating rikoreshwa cyane cyane mu gushyira irangi rikomeye ku bimera.

Isoko ya cathode arc ni isoko y’ubushyuhe idafite ikidendezi gihamye, kandi aho isoko ya arc ishobora gushyirwa hadakoreshejwe, bikongera umuvuduko w’umwanya w’icyumba cyo gutwikira no kongera ubushobozi bwo gutwara umuriro. Imiterere y’isoko ya cathode arc irimo amasoko mato ya cathode arc azengurutse, amasoko ya arc ya columnar, n’amasoko manini ya arc afite uruziga. Ibice bitandukanye by’isoko mato ya arc, amasoko ya arc ya columnar, n’amasoko manini ya arc bishobora gushyirwa ukwabyo kugira ngo bishyiremo filime zifite urwego rwinshi na filime zifite urwego rwinshi. Hagati aho, bitewe n’umuvuduko mwinshi wa ionization y’icyuma cya cathodic arc ion, iyoni z’icyuma zishobora kwinjiza imyuka myinshi yo gukora, bigatuma habaho uburyo bwinshi bwo gukora no koroshya imikorere kugira ngo haboneke impuzandengo ikomeye. Ariko, hari uduce duto tw’imiterere y’urwego rw’ubushyuhe ruboneka hakoreshejwe impuzandengo ya cathodic arc ion. Mu myaka ya vuba aha, hari ikoranabuhanga rishya ryagaragaye kugira ngo rinoze imiterere y’urwego rw’ubushyuhe, byazamuye ireme rya filime ifite impuzandengo ya arc ion.