Njira zachikhalidwe zoyika zokutira zolimba

1. Ukadaulo wa CVD wotentha

Zophimba zolimba nthawi zambiri zimakhala zophimba zachitsulo (TiN, ndi zina zotero), zomwe zimapangidwa ndi momwe chitsulo chimagwirira ntchito mu zophimba ndi mpweya wochitapo kanthu. Poyamba, ukadaulo wa CVD wotentha unkagwiritsidwa ntchito kupereka mphamvu yoyambitsa ya Combination reaction ndi mphamvu yotentha pa kutentha kwakukulu kwa 1000 ℃. Kutentha kumeneku ndikoyenera kokha kuyika TiN ndi zophimba zina zolimba pazida za carbide zomangidwa ndi simenti. Mpaka pano, ikadali ukadaulo wofunikira kwambiri pakuyika zophimba za TiN - Al2O3 pamitu ya zida za carbide zomangidwa ndi simenti.

1. Chophimba cha ion cha cathode chopanda kanthu ndi chophimba cha ion cha waya wotentha

M'zaka za m'ma 1980, zida zodulira za hollow cathode ion ndi hot wire arc ion coating zinagwiritsidwa ntchito poika zida zodulira zophimbidwa. Njira zonsezi zodulira za ion coating ndi njira zodulira za arc discharge ion, zomwe zimakhala ndi chitsulo chofika pa 20% ~ 40%.

1. Chophimba cha ion cha arc cathode

Kutulukira kwa cathodic arc ion cating kwapangitsa kuti pakhale ukadaulo woyika zophimba zolimba pa nkhungu. Kuchuluka kwa ionization kwa zophimba za cathodic arc ion ndi 60% ~ 90%, zomwe zimapangitsa kuti ma ions ambiri achitsulo ndi ma ions a gasi a reaction afike pamwamba pa workpiece ndikukhalabe ndi ntchito zambiri, zomwe zimapangitsa kuti zophimba zolimba monga TiN zikhazikike komanso zipangidwe. Pakadali pano, ukadaulo wopaka wa cathodic arc ion umagwiritsidwa ntchito kwambiri poyika zophimba zolimba pa nkhungu.

Gwero la cathode arc ndi gwero lopanda mpweya lopanda dziwe losungunuka lokhazikika, ndipo malo a gwero la arc akhoza kuyikidwa mwachisawawa, zomwe zimapangitsa kuti chipinda chophikira chikhale ndi malo ogwiritsira ntchito malo ndikuwonjezera mphamvu yonyamula ng'anjo. Mawonekedwe a magwero a cathode arc akuphatikizapo magwero ang'onoang'ono ozungulira a cathode arc, magwero a columnar arc, ndi magwero akuluakulu a arc ang'onoang'ono. Zigawo zosiyanasiyana za magwero ang'onoang'ono a arc, magwero a columnar arc, ndi magwero akuluakulu a arc zitha kukonzedwa padera kuti ziike mafilimu ambiri ndi mafilimu a nano multilayer. Pakadali pano, chifukwa cha kuchuluka kwa ionization yachitsulo cha cathodic arc ion, ma ions achitsulo amatha kuyamwa mpweya wambiri wochitapo kanthu, zomwe zimapangitsa kuti pakhale njira zambiri komanso ntchito yosavuta kuti mupeze zokutira zolimba zabwino kwambiri. Komabe, pali madontho ochepa mu kapangidwe ka micro-structure ka gawo lophikira lomwe limapezeka ndi zokutira za cathodic arc ion. M'zaka zaposachedwa, ukadaulo watsopano wambiri watulukira kuti usinthe kapangidwe ka gawo la filimu, zomwe zawongolera mtundu wa filimu yophikira ya arc ion.