Ngā tikanga tuku iho mō te whakatakoto i ngā paninga mārō

1. Hangarau CVD wera

Ko ngā paninga mārō he paninga uku whakarewa (TiN, me ētahi atu), e hangaia ana mā te tauhohenga o te konganuku i roto i te paninga me te hau tauhohe. I te tīmatanga, i whakamahia te hangarau CVD wera hei whakarato i te kaha whakahohe o te tauhohenga whakakotahi mā te kaha wera i te pāmahana teitei o te 1000 ℃. He pai anake tēnei pāmahana mō te whakatakoto i te TiN me ētahi atu paninga mārō ki runga i ngā taputapu carbide sima. Tae noa ki tēnei wā, he hangarau nui tonu tēnei mō te whakatakoto i ngā paninga hiato TiN – Al2O3 ki runga i ngā pane taputapu carbide sima.

1. Paninga katote katote tuwhera me te paninga katote pewa waea wera

I ngā tau 1980, i whakamahia te paninga katote kōhao me te paninga katote pewa waea wera hei whakatakoto i ngā taputapu tapahi paninga. Ko ēnei hangarau paninga katote e rua he hangarau paninga katote tukunga pewa, me te tere katote whakarewa tae atu ki te 20%~40%.

1. Paninga katote pewa katote

Nā te putanga mai o te whakakā ion āwhata katotika kua hua ake te whanaketanga o te hangarau whakatakoto paninga mārō ki runga i ngā pokepokea ai. Ko te tere whakakā o te paninga ion āwhata katotika he 60%~90%, e āhei ai te maha o ngā ion konganuku me ngā ion hau tauhohenga ki te tae ki te mata o te mea mahi, me te pupuri tonu i te kaha teitei, ka hua ake te whakatakoto tauhohenga me te hanganga o ngā paninga mārō pērā i te TiN. I tēnei wā, ko te hangarau paninga ion āwhata katotika te mea e whakamahia nuitia ana ki te whakatakoto paninga mārō ki runga i ngā pokepokea ai.

Ko te pūtake pewa katote he pūtake mimiti totoka, kāore he puna rewa pumau, ā, ka taea te whakanoho i te tūranga o te pūtake pewa kia kore e hiahiatia, kia pai ake ai te tere whakamahinga o te wāhi o te rūma paninga me te whakanui ake i te kaha uta oumu. Ko ngā āhua o ngā pūtake pewa katote ko ngā pūtake pewa katote porowhita iti, ngā pūtake pewa poutū, me ngā pūtake pewa nui papatahi tapawhā. Ka taea te whakarite motuhake i ngā wāhanga rerekē o ngā pūtake pewa iti, ngā pūtake pewa poutū, me ngā pūtake pewa nui hei whakatakoto i ngā kiriata papa maha me ngā kiriata papa maha nano. I taua wā, nā te tere whakakoi whakarewa teitei o te paninga katote pewa katote, ka taea e ngā katote whakarewa te mimiti i ngā hau tauhohenga, ka hua ake he whānuitanga tukanga whānui me te mahi ngāwari hei whiwhi paninga pakeke pai rawa atu. Heoi, he pata matotoru kei roto i te hanganga moroiti o te paparanga paninga i whiwhihia e te paninga katote pewa katote. I ngā tau tata nei, he maha ngā hangarau hou kua puta hei whakapai ake i te hanganga o te paparanga kiriata, kua pai ake ai te kounga o te kiriata paninga katote pewa.