Usoro nkịtị maka itinye mkpuchi siri ike

1. Teknụzụ CVD okpomọkụ

Mkpuchi siri ike bụ ihe mkpuchi seramiiki ígwè (TiN, wdg), nke a na-emepụta site na mmeghachi omume nke ígwè na mkpuchi na gasification reactive. Na mbụ, e jiri teknụzụ okpomọkụ CVD nye ike mkpali nke mmeghachi omume ngwakọta site na ike okpomọkụ na okpomọkụ dị elu nke 1000 ℃. Okpomọkụ a dabara naanị maka itinye TiN na mkpuchi siri ike ndị ọzọ na ngwaọrụ carbide simenti. Ruo ugbu a, ọ ka bụ teknụzụ dị mkpa maka itinye mkpuchi mejupụtara TiN - Al2O3 na isi ngwaọrụ carbide simenti.

1. Mkpuchi ion cathode oghere na mkpuchi ion waya ọkụ

N'afọ 1980, e ji ihe mkpuchi kathode hollow na mkpuchi waya arc ion dị ọkụ tinye ngwaọrụ ịkpụ ihe mkpuchi. Teknụzụ mkpuchi ion abụọ a bụ teknụzụ mkpuchi arc discharge ion, yana ọnụego ionization metal ruru 20% ~ 40%.

1. Mkpuchi ion cathode arc

Mmalite nke cathodic arc ion cating emeela ka e nwee mmepe nke teknụzụ nke itinye mkpuchi siri ike na ebu. Ọnụego ionization nke mkpuchi cathodic arc ion bụ 60% ~ 90%, na-enye ohere ka ọtụtụ ion ígwè na ion gas reaction rute elu nke ọrụ ahụ ma ka na-arụ ọrụ dị elu, na-ebute ntinye mmeghachi omume na ịmepụta mkpuchi siri ike dịka TiN. Ugbu a, a na-ejikarị teknụzụ mkpuchi cathodic arc ion eme ihe iji tinye mkpuchi siri ike na ebu.

Isi iyi cathode arc bụ isi iyi mmiri siri ike na-enweghị ọdọ mmiri a gbazere agbaze, enwere ike itinye ọnọdụ isi iyi arc n'enweghị usoro, na-eme ka ọnụego ojiji oghere nke ụlọ mkpuchi dịkwuo mma ma na-amụba ikike ibu ọkụ. Ụdị isi iyi cathode arc gụnyere obere isi iyi cathode arc gburugburu, isi iyi columnar arc, na isi iyi arc dị larịị nke nwere akụkụ anọ. Enwere ike ịhazi akụkụ dị iche iche nke isi iyi arc, isi iyi columnar arc, na isi iyi arc buru ibu iche iche iji debe ihe nkiri dị iche iche na ihe nkiri nano multilayer. Ka ọ dị ugbu a, n'ihi oke ionization metal nke mkpuchi cathodic arc ion, ion metal nwere ike ịmịkọrọ gas mmeghachi omume karịa, na-ebute oke usoro na ọrụ dị mfe iji nweta mkpuchi siri ike dị mma. Agbanyeghị, enwere obere ntụpọ na obere nhazi nke oyi akwa mkpuchi nke mkpuchi cathodic arc ion nwetara. N'afọ ndị na-adịbeghị anya, ọtụtụ teknụzụ ọhụrụ apụtala iji mee ka nhazi nke oyi akwa fim ahụ ka mma, nke emeela ka mma nke ihe nkiri mkpuchi arc ion dịkwuo mma.