Kwiinkqubo zokugquma nge-vacuum,izinga lokufaka imali yenye yeeparameter eziphambili ezimisela ukusebenza kakuhle kwemveliso kunye neempawu zefilimu. Nangona kunjalo, amazinga aphezulu kakhulu okanye aphantsi okufakwa kwefilimu anokuchaphazela ngqo umgangatho wefilimu, ngaloo ndlela echaphazela ukusebenza kwayo kokukhanya, umbane, kunye nokusebenza koomatshini. Ukufikelela kwibhalansi efanelekileyo phakathi kwesantya sokufakwa kwefilimu kunye nomgangatho kubalulekile ekwenzeni ngcono inkqubo yefilimu encinci.
I. Ingcamango esisiseko yezinga lokufaka imali
Izinga lokuchithwa kwe-fluid lidla ngokubonakaliswa nge-nm/s okanye nge-Å/s, nto leyo ebonisa ubukhulu befilimu obubekwe ngexesha ngalinye kumphezulu we-substrate. Lichatshazelwa zizinto ezininzi, kuquka:
Inqanaba leVacuum: Uxinzelelo oluphezulu olungasemva lukhokelela ekusasazekeni kwamasuntswana, nto leyo enciphisa izinga elifanelekileyo lokufakwa kwawo.
Igalelo lamandla: Amandla okufudumeza omthombo wokufuma okanye umsinga wokukhupha amanzi kwindawo ekujoliswe kuyo ukufutha alawula izinga lokufutha/lokufuma.
Ukuhamba kwegesi kwinkqubo: Kwi-reactive sputtering, uxinaniso lwegesi luchaphazela ngokuthe ngqo izinga lokufakwa.
II. Iindlela zokudibanisa izinga lokubekwa kwefilimu kunye nomgangatho wefilimu
Iziphumo zezinga eliphezulu kakhulu lokuchithwa kwemali
Uxinano oluphantsi lweFilimu: Ixesha elincinci lokusasazeka komphezulu ngamanani aphezulu libangela izakhiwo ezinemingxuma.
Iingxaki zoXinzelelo kunye nokunamathela: Ukuqokelelwa ngokukhawuleza kwandisa uxinzelelo lwangaphakathi kwaye kunciphisa ukunamathela.
Ukuguquguquka kokukhanya: Ukuchaneka kobukhulu obuphantsi kubangela ukuphambuka kwi-refractive index okanye i-transmittance.
Iziphumo zezinga eliphantsi kakhulu lokuchithwa kwemali
Imveliso Ephantsi: Ixesha elide lokujikeleza kwiindawo ezinkulu linciphisa ukukhupha.
Umngcipheko Wongcoliseko: Ukufakwa ixesha elide kwandisa amathuba okufakwa kwegesi eseleyo okanye ukungcola.
Ukukhula Okungaqhelekanga Kweenkozo: Kwizinto ezithile, ukufunxwa kancinci kakhulu kukhuthaza uburhabaxa obugqithisileyo bomphezulu okanye iinkozo ezirhabaxa.
Ifestile efanelekileyo yokubeka
Izinga lokufakwa eliphakathi liqinisekisa ulungelelwaniso phakathi koxinano lwefilimu, ulawulo loxinzelelo, kunye nokufana kobukhulu.
Enyanisweni, ukulinganiswa kwamanani kunye ne-Quartz Crystal Monitoring (QCM) zisetyenziswa kakhulu ukulawula amanani ngokuchanekileyo.
III. Ulawulo lweNqanaba kwiindlela ezahlukeneyo zokubeka imali
Ukufuma kobushushu: Isantya esiphezulu sinokubangela ukutshica kunye neziphene zeenxalenye; ukufudumeza ngokulandelelana kusetyenziswa ukuzinzisa ukufuma kobushushu.
Ukutshiza kweMagnetron: Isantya sichatshazelwa ngamandla ekujoliswe kuwo kunye nokuhamba kwegesi kwinkqubo; ukulungiswa kufuneka kulungelelanise ukusebenza kakuhle kokusetyenziswa kwawo kunye nokufana kwefilimu.
Ukutshiza Okusebenzayo: Izinga lokukhupha lichaphazeleka kakhulu kukutya okujoliswe kuko, okufuna ulawulo lokuhamba kweplasma/igesi oluvaliweyo.
IV. Iinkqubo Zoshishino
Kwiingubo zokukhanya, ulawulo lwesantya ludibene ngokuthe ngqo nokuchaneka kwesalathisi sokukhanyela kunye nokuhambelana kombala ophazamisekileyo.
Kwiifilimu ezincinci ze-semiconductor, isantya esiphezulu sinokutshintsha ukuxhathisa kwefilimu, oko kunciphisa ukusebenza kwesixhobo.
Kwiingubo zokuhombisa, kukhethwa amazinga aphezulu ukuze kuphuculwe imveliso kwindawo enkulu, ukuba nje kugcinwa ukufana.
Ubudlelwane phakathi kwezinga lokufakwa kwefilimu kunye nomgangatho wefilimu budibene ngokuqinileyo: izinga eliphezulu kakhulu lichaphazela uxinano kunye nokunamathela, ngelixa izinga eliphantsi kakhulu linciphisa imveliso kwaye landisa umngcipheko wokungcola. Kuphela ngolawulo oluchanekileyo lwezinga lokufakwa kwefilimu kunye nokwenza ngcono inkqubo apho abavelisi banokufikelela khona ulungelelwaniso olufanelekileyo phakathi kokusebenza kakuhle kunye nomgangatho, ukuhlangabezana neemfuno zezicelo ze-optical, ze-elektroniki, kunye nezokuhlobisa.
—Eli nqaku lipapashwe nguizixhobo zokugquma nge-vacuumumenzi we-Zhenhua Vacuum
Ixesha lokuthumela: Feb-04-2026