N'ime usoro mkpuchi vacuum,ọnụego itinye ego bụ otu n'ime ihe ndị bụ isi na-ekpebi ma arụmọrụ mmepụta na ihe ndị metụtara fim. Agbanyeghị, oke ma ọ bụ obere ọnụego ntinye ihe nwere ike imetụta ịdị mma fim ozugbo, si otú a na-emetụta arụmọrụ anya, eletriki, na igwe. Ime ka nguzozi ziri ezi dị n'etiti ọnụego ntinye ihe na ịdị mma dị oke mkpa maka nhazi usoro ihe nkiri dị gịrịgịrị.
I. Echiche bụ isi nke ọnụego nkwụnye ego
A na-egosipụtakarị ọnụego mwepụta na nm/s ma ọ bụ Å/s, nke na-anọchite anya ọkpụrụkpụ ihe nkiri ahụ nke a na-etinye kwa oge otu n'elu ihe ndị dị n'elu ala. Ọtụtụ ihe na-emetụta ya, gụnyere:
Ọkwa Vacuum: Nrụgide ndabere dị elu na-eduga na mgbasa nke ihe ndị dị ndụ, na-ebelata ọnụego nchekwa dị irè.
Ntinye Ike: Ike ikpo ọkụ nke isi iyi evaporation ma ọ bụ ugbu a na-ewepụta ihe mgbaru ọsọ sputtering na-ekpebi ọnụego sputtering/evaporation.
Usoro Gas Flow: Na mmeghachi omume sputtering, mkpokọta gas na-emetụta ọnụego nkwụnye ego ozugbo.
II. Usoro Ijikọ Ọnụego Ntinye na Ogo Ihe Nkiri
Mmetụta nke Oke Oke Ọnụego Mbelata
Njupụta ihe nkiri dị ala: Oge mgbasa elu pere mpe na oke ọnụego na-eme ka ihe owuwu ndị nwere oghere dị warara.
Nsogbu Nrụgide na Mrachi: Mkpokọta ngwa ngwa na-eme ka nrụgide dị n'ime ahụ dịkwuo elu ma na-ebelata nrachi.
Mgbanwe Anya: Izi ezi nke oke ọkpụrụkpụ na-akpata mgbanwe na ntinye anya ma ọ bụ nnyefe.
Mmetụta nke Oke Oke Ọnụego Mbelata
Mmepụta Dị Ala: Ogologo oge okirikiri maka ihe ndị dị n'akụkụ buru ibu na-ebelata mmepụta.
Ihe Ize Ndụ Mmerụ Ahụ: Ịtinye ihe n'ime ya na-eme ka ohere nke gas fọdụrụ ma ọ bụ ihe na-adịghị ọcha dịkwuo elu.
Uto Mkpụrụ Na-adịghị Mma: N'ihe ụfọdụ, itinye obere oge na-eme ka elu ya sie ike ma ọ bụ mkpụrụ osisi dị nro.
Window Ndoputa Kachasị Mma
Ọnụego ntinye dị ala na-eme ka nguzozi dị n'etiti njupụta ihe nkiri, njikwa nrụgide, na ịdị n'otu ọkpụrụkpụ.
N'ọrụ, a na-ejikarị nhazi ọnụego na Quartz Crystal Monitoring (QCM) eme ihe maka njikwa ọnụego ziri ezi.
III. Njikwa ọnụego n'ime usoro dị iche iche nke itinye ego
Mmiri ọkụ: Oke oke nwere ike ibute ịgbụpụ mmiri na ntụpọ nke irighiri ihe; a na-eji ikpo ọkụ nzọụkwụ iji mee ka mmiri ghara ịpụ apụ.
Magnetron Sputtering: Ike ebumnuche na usoro gas na-emetụta ọnụego; nhazi kwesịrị ịhazi arụmọrụ ojiji ebumnuche na otu ihe nkiri.
Nsịpụta mmeghachi omume: Nsi a na-achọ ime na-emetụta ọnụego mwepụ ihe, nke chọrọ njikwa usoro plasma/gas mechiri emechi.
IV. Ọrụ Ụlọ Ọrụ
N'ime mkpuchi anya, njikwa ọnụego jikọtara kpọmkwem na izi ezi nke index refractive na nhazi agba nnyonye anya.
Na ihe nkiri semiconductor dị gịrịgịrị, oke ọsọ nwere ike ịgbanwe iguzogide ihe nkiri ahụ, na-emebi arụmọrụ ngwaọrụ.
N'ime ihe mkpuchi mma, a na-ahọrọ ọnụego dị elu iji mee ka mmepụta buru ibu dịkwuo elu, ma ọ bụrụhaala na ejiri otu aka nọgide na-adị.
Mmekọrịta dị n'etiti ọnụego ntinye na ịdị mma nke ihe nkiri ahụ jikọtara nke ọma: oke ọnụego na-emebi njupụta na njikọta, ebe oke ọnụego na-ebelata mmepụta ma na-abawanye ihe egwu mmetọ. Naanị site na njikwa ọnụego ntinye na nhazi usoro ziri ezi ka ndị nrụpụta nwere ike nweta nguzozi kacha mma n'etiti arụmọrụ na ịdị mma, na-emezu ihe achọrọ nke ngwa anya, eletrọnịkị, na ihe ịchọ mma.
—E bipụtara akụkọ a site n'aka onye bipụtara yaakụrụngwa mkpuchi agụụonye nrụpụta Zhenhua Vacuum
Oge ozi: Feb-04-2026