ISahluko soku-1 sePlasma eyomeleziweyo woMphunga weMichiza

Ukubekwa kweMichiza yoMphunga (CVD). Njengoko igama lisitsho, bubuchwephesha obusebenzisa i-gaseous precursor reactants ukuvelisa iifilimu ezomeleleyo ngeathom kunye ne-intermolecular reaction reaction. Ngokungafaniyo ne-PVD, inkqubo ye-CVD iqhutyelwa ubukhulu becala kwindawo yoxinzelelo oluphezulu (i-vacuum ephantsi), kunye noxinzelelo oluphezulu lusetyenziswa ngokuyinhloko ukunyusa izinga lokubeka ifilimu. Ukubekwa komphunga kwikhemikhali kungahlelwa ngokwe-CVD ngokubanzi (ekwabizwa ngokuba yi-thermal CVD) kunye ne-plasma-enhanced chemical vapor deposition (I-Plasma-Enhanced Chemical Vapor Deposition. PECVD) ngokuhambelana nokuba iplasma iyabandakanyeka kwinkqubo yokubeka. Eli candelo lijolise kubuchwepheshe be-PECVD kuquka inkqubo ye-PECVD kunye nezixhobo ezisetyenziswa ngokuqhelekileyo ze-PECVD kunye nomgaqo wokusebenza.

I-Plasma-ephuculweyo yokubeka umphunga wekhemikhali yifilimu ebhityileyo yekhemikhali yokubeka umphunga ubuchule obusebenzisa iplasma yokukhupha okukhanyayo ukwenza impembelelo kwinkqubo yokubeka ngelixa inkqubo yokubeka umphunga wekhemikhali yoxinzelelo oluphantsi isenzeka. Ngale ndlela, itekhnoloji ye-CVD eqhelekileyo ixhomekeke kubushushu obuphezulu be-substrate ukuqonda ukusabela kweekhemikhali phakathi kwezinto zesigaba segesi kunye nokubekwa kweefilim ezibhityileyo, kwaye ke ngoko inokubizwa ngokuba yitekhnoloji ye-thermal CVD.

Kwisixhobo se-PECVD, uxinzelelo lwegesi olusebenzayo lumalunga ne-5 ~ 500 Pa, kwaye ubuninzi bee-electron kunye ne-ion bunokufikelela kwi-109 ~ 1012 / cm3, ngelixa amandla aphakathi kwee-electron angafikelela kwi-1 ~ 10 eV. Yintoni eyahlula indlela ye-PECVD kwezinye iindlela ze-CVD kukuba i-plasma iqulethe inani elikhulu lee-electron zamandla aphezulu, ezinokubonelela ngamandla okusebenza afunekayo kwinkqubo yokubeka umphunga wekhemikhali. Ukungqubana kwee-electron kunye ne-gas-phase molekyuli kunokukhuthaza ukubola, i-chemosynthesis, i-excitation kunye neenkqubo ze-ionization ze-molecule zegesi, ukuvelisa amaqela ekhemikhali asebenzayo kakhulu, ngaloo ndlela kunciphisa kakhulu iqondo lobushushu be-CVD yokubeka ifilimu encinci, okwenza kube nokwenzeka ukuqonda inkqubo ye-CVD, efunekayo ekuqaleni ukuba iqhutywe kumaqondo obushushu aphantsi, kwiqondo lokushisa eliphantsi. Inzuzo yeqondo eliphantsi lobushushu obuphantsi bokubekwa kwefilimu kukuba inokuthintela ukusasazwa ngokungeyomfuneko kunye nokusabela kweekhemikhali phakathi kwefilimu kunye ne-substrate, utshintsho lwesakhiwo kunye nokuwohloka kwefilimu okanye i-substrate material, kunye noxinzelelo olukhulu lwe-thermal kwifilimu nakwi-substrate.

–Eli nqaku likhutshwa nguumenzi womatshini wokugqumaGuangdong Zhenhua