Ha ho beoa ha liathomo tsa lera ho qala, bombardment ea ion e na le litlamorao tse latelang ho membrane / substrate interface.
(1) Ho tsoakana ’meleng. Ka lebaka la ente ea ion e nang le matla a phahameng, ho phatloha ha liathomo tse kentsoeng le ho kenngoa ha liathomo tse ka holimo le ho thulana ha cascade, ho tla etsa hore sebaka se haufi-ufi sa "membrane" / "base interface" sa likaroloana tsa substrate le likarolo tsa membrane tsa motsoako o sa qhalaneng, phello ena ea ho kopanya e tla thusa ho thehoa ha "membrane" ea "transfusion", "interface" pakeng tsa lera / setsi segokanyimmediamentsi sa sebolokigolo, ho fihlela ho microns tse seng kae botenya. Li-micrometer tse 'maloa tse teteaneng, tseo ho tsona ho ka hlahang mekhahlelo e mecha. Sena se molemo haholo ho ntlafatsa matla a ho khomarela a membrane / base interface.
(2) Phatlalatso e ntlafalitsoeng. Boemo bo phahameng ba sekoli sebakeng se haufi-ufi le mocheso o phahameng li eketsa sekhahla sa ho hasana. Kaha bokaholimo ke bofokoli ba ntlha, li-ion tse nyane li na le tšekamelo ea ho kheloha bokaholimo, 'me bombardment ea ion e na le phello ea ho ntlafatsa ho kheloha ha bokaholimo le ho ntlafatsa phallo e kopaneng ea liathomo tse kentsoeng le tsa substrate.
(3) Mokhoa o ntlafetseng oa nucleation. Thepa ea athomo e khutsufalitsoeng holim'a substrate e khethoa ke tšebelisano ea eona ea bokaholimo le thepa ea eona ea ho falla holimo. Haeba ho se na tšebelisano e matla pakeng tsa athomo e khutsufalitsoeng le bokaholimo ba substrate, athomo e tla hasana ka holim'a metsi ho fihlela e e-na le matla a phahameng kapa e thulana le liathomo tse ling tse fapaneng. Mokhoa ona oa nucleation o bitsoa non-reactive nucleation. Esita le haeba ea pele e le ea nyeoe ea non-reactive nucleation mode, ka ion bombardment ea substrate surface e ka hlahisa mefokolo e eketsehileng, e eketsa sekhahla sa nucleation, e leng se loketseng haholoanyane ho thehoa ha diffusion - reactive nucleation mode.
(4) Ho tlosoa ho khethehileng ha liathomo tse tlanngoeng ka bolokolohi. Ho phatloha ha liathomo tse holim'a holim'a metsi ho khethoa ke boemo ba lehae ba tlamahano, 'me ho phatloha ha li-ion ka holim'a metsi ho na le monyetla oa ho ntša liathomo tse hlephileng. Phello ena e bonahala haholoanyane ha ho etsoa li-interfaces tsa diffusion-reactive.
(5) Ntlafatso ea tšireletso holim'a metsi le ntlafatso ea plating bypass. Ka lebaka la khatello e phahameng ea khase ea ion plating, liathomo tse mouoane kapa tse hahelletsoeng li oela tlas'a ho thulana le liathomo tsa khase ho matlafatsa ho hasana, ho fella ka thepa e ntle ea ho koahela.
-Sengoliloeng sena se lokolloa kemoetsi oa mochine oa vacuum coatingGuangdong Zhenhua
Nako ea poso: Dec-09-2023