Thaum qhov kev tso cov atoms membrane pib, ion bombardment muaj cov teebmeem hauv qab no ntawm lub membrane / substrate interface.
(1) Kev sib xyaw ua ke ntawm lub cev. Vim yog kev txhaj tshuaj ion muaj zog heev, kev tawg ntawm cov atoms uas tau tso rau hauv cov atoms thiab kev txhaj tshuaj rov qab ntawm cov atoms saum npoo av thiab kev sib tsoo cascade, yuav ua rau thaj chaw ze ntawm qhov sib txuas ntawm daim nyias nyias/lub hauv paus ntawm cov khoom siv hauv paus thiab cov khoom siv hauv daim nyias nyias ntawm qhov sib xyaw tsis sib kis, qhov kev sib xyaw ua ke no yuav ua rau muaj kev tsim ntawm daim nyias nyias/lub hauv paus "pseudo-diffusion txheej", uas yog, txheej hloov pauv ntawm daim nyias nyias/lub hauv paus sib txuas, txog li ob peb microns tuab. Ob peb micrometers tuab, uas tej zaum yuav tshwm sim cov theem tshiab. Qhov no zoo heev rau kev txhim kho lub zog nplaum ntawm daim nyias nyias/lub hauv paus sib txuas.
(2) Kev sib kis zoo dua. Qhov muaj qhov tsis zoo ntau hauv thaj chaw ze ntawm qhov chaw thiab qhov kub siab ua rau qhov sib kis sai dua. Vim tias qhov chaw yog qhov tsis zoo, cov ions me me feem ntau yuav tig mus rau qhov chaw, thiab kev foob pob ion muaj qhov cuam tshuam ntawm kev txhim kho qhov kev hloov pauv ntawm qhov chaw thiab txhim kho kev sib kis ntawm cov atoms tso thiab cov substrate.
(3) Hom kev txhim kho nucleation. Cov khoom ntawm lub atom condensed rau ntawm qhov chaw substrate yog txiav txim siab los ntawm nws qhov kev sib cuam tshuam ntawm qhov chaw thiab nws cov khoom tsiv teb tsaws chaw ntawm qhov chaw. Yog tias tsis muaj kev sib cuam tshuam muaj zog ntawm lub atom condensed thiab qhov chaw ntawm lub substrate, lub atom yuav diffuse rau ntawm qhov chaw kom txog thaum nws nucleates ntawm qhov chaw muaj zog lossis sib tsoo nrog lwm cov atoms diffusing. Hom kev nucleation no hu ua nucleation tsis-reactive. Txawm tias tus thawj yog rau cov ntaub ntawv ntawm hom kev nucleation tsis-reactive, los ntawm ion bombardment ntawm qhov chaw substrate tuaj yeem tsim ntau qhov tsis zoo, ua rau nucleation ceev, uas yog qhov zoo dua rau kev tsim ntawm diffusion - reactive nucleation hom.
(4) Kev tshem tawm cov atoms uas tsis sib txuas ua ke zoo dua. Kev tawg ntawm cov atoms saum npoo av yog txiav txim siab los ntawm lub xeev sib txuas hauv zos, thiab kev tawg ntawm cov ion ntawm qhov chaw yuav ua rau cov atoms uas tsis sib txuas ua ke tawg ntau dua. Cov nyhuv no pom tseeb dua hauv kev tsim cov diffusion-reactive interfaces.
(5) Kev txhim kho ntawm qhov chaw npog thiab kev txhim kho ntawm plating bypass. Vim yog lub siab ua haujlwm roj ntawm ion plating, cov atoms evaporated lossis sputtered raug kev sib tsoo nrog cov atoms roj kom txhim kho kev tawg, ua rau cov txheej txheem qhwv zoo.
– Tsab xov xwm no yog tso tawm los ntawmlub tshuab nqus tsev txheej tshuab chaw tsim khoomGuangdong Zhenhua
Lub sijhawm tshaj tawm: Lub Kaum Ob Hlis-09-2023