Maxay yihiin waxyaabaha saameeya sunta bartilmaameedka ee ku jirta xoqidda magnetron?

1, Samaynta isku-dhisyo bir ah oo ku yaal dusha bartilmaameedka
Xaggee isku-dhafka lagu sameeyay habka sameynta isku-dhafan laga bilaabo dusha bartilmaameedka birta ah iyadoo la adeegsanayo habka sputtering reactive? Maadaama falgalka kiimikada ee u dhexeeya walxaha gaaska falgalka ah iyo atamka dusha bartilmaameedka ah ay soo saaraan atamka isku-dhafan, kaas oo badanaa ah mid ka baxsan kuleylka, kulaylka falgalka waa inuu lahaadaa hab uu ku fuliyo, haddii kale falgalka kiimikada ma sii socon karo. Xaaladaha faakuumka, wareejinta kulaylka ee u dhaxaysa gaasaska suurtagal ma aha, sidaa darteed falgalka kiimikada waa inuu ka dhacaa dusha adag. Sputtering reaction wuxuu abuuraa isku-dhafan dusha bartilmaameedka ah, dusha sare ee substrate-ka, iyo dusha sare ee kale ee dhismaha. Abuuritaanka isku-dhafan dusha sare ee substrate-ka waa yoolka, abuurista isku-dhafan dusha sare ee qaab-dhismeedka kale waa khasaare kheyraad, soo saarista isku-dhafan dusha sare ee bartilmaameedkana waxay ka bilaabataa sidii isha atamka isku-dhafan waxayna noqotaa caqabad si joogto ah u bixinta atamka isku-dhafan oo badan.

2, Arrimaha saamaynta ku leh sunta bartilmaameedka ah
Qodobka ugu muhiimsan ee saameeya sunta bartilmaameedka ah waa saamiga gaaska falgalka iyo gaaska falgalka, gaaska falgalka badan wuxuu horseedi doonaa sunta bartilmaameedka ah. Habka faafinta falgalka ah waxaa lagu sameeyaa aagga kanaalka falgalka ah ee dusha sare ee bartilmaameedka ah wuxuu u muuqdaa inuu daboolayo isku-darka falgalka ama isku-darka falgalka ayaa la furfuraa oo dib loo soo bandhigaa dusha birta. Haddii heerka soo saarista isku-dhafka ah uu ka weyn yahay heerka xoqidda isku-dhafka ah, aagga daboolida isku-dhafka ah ayaa kordha. Awood gaar ah, xaddiga gaaska falgalka ah ee ku lug leh soo saarista isku-dhafka ah ayaa kordha oo heerka soo saarista isku-dhafka ah ayaa kordha. Haddii xaddiga gaaska falgalka uu si xad dhaaf ah u kordho, aagga daboolida isku-dhafka ah ayaa kordha. Haddii heerka socodka gaaska falgalka aan la hagaajin karin waqtiga, heerka kororka aagga daboolida isku-dhafka ah lama cabudhinayo, kanaalka faafintana waxaa sii dabooli doona isku-darka, marka bartilmaameedka faafinta uu si buuxda u daboolo isku-darka, bartilmaameedku gebi ahaanba waa la sumeeyaa.

3, Ifafaalaha sunta bartilmaameedka
(1) ururinta ion-ka togan: marka sunta bartilmaameedka ah, lakab filim dahaadh ah ayaa laga samayn doonaa dusha bartilmaameedka, ion-yada togan waxay gaaraan dusha bartilmaameedka cathode-ka sababtoo ah xannibaadda lakabka dahaadh. Si toos ah uma galaan dusha bartilmaameedka cathode-ka, laakiin waxay ku ururaan dusha bartilmaameedka, si fudud ayaa loo soo saari karaa dheecaanka meel qabow ilaa qaanso - oo la qaloocinayo, si uusan u sii socon karin faafinta cathode-ka.
(2) baaba'a anode: marka sunta bartilmaameedka ah, derbiga qolka faakuumka ee dhulka ku yaal ayaa sidoo kale kaydiya filim dahaadh ah, oo gaaraya elektaroonada anode-ka ma geli karaan anode-ka, sameynta ifafaale baaba'a anode.

4, Sharaxaadda jireed ee sunta bartilmaameedka ah
(1) Guud ahaan, isku-dhafka sii deynta elektarooniga labaad ee isku-dhafka birta ayaa ka sarreeya kan biraha. Ka dib sumowga bartilmaameedka, dusha sare ee bartilmaameedku waa dhammaan isku-dhafka birta, ka dib marka ay ku dhuftaan ayoonnada, tirada elektaroonada labaad ee la sii daayo ayaa kordha, taas oo wanaajisa socodka booska oo yareysa iska caabinta balaasmaha, taasoo horseedaysa danab hoose oo sii daaya. Tani waxay yareysaa heerka sii daaya. Guud ahaan danabka sii daaya ee sii daaya magnetron-ka wuxuu u dhexeeyaa 400V-600V, marka sunta bartilmaameedka ahna ay dhacdo, danabka sii daaya si weyn ayaa loo dhimaa.
(2) Heerka bartilmaameedka birta iyo bartilmaameedka isku-dhafka ah asal ahaan way kala duwan yihiin, guud ahaan isku-dhafka foorarsiga birta ayaa ka sarreeya isku-dhafka foorarsiga ee isku-dhafka ah, sidaa darteed heerka foorarsiga ayaa hooseeya ka dib sumowga bartilmaameedka.
(3) Hufnaanta faafinta ee gaaska faafinta falcelinta leh asal ahaan way ka hooseysaa hufnaanta faafinta ee gaaska aan firfircoonayn, sidaa darteed heerka faafinta dhammaystiran ayaa hoos u dhacaya ka dib marka saamiga gaaska falgalka ahi uu kordho.

5, Xalalka loogu talagalay sunta bartilmaameedka ah
(1) Qaado korontada soo noqnoqota dhexdhexaadka ah ama korontada soo noqnoqota raadiyaha.
(2) Qaado xakamaynta wareegga xiran ee qulqulka gaaska falcelinta.
(3) Qaado bartilmaameedyo mataano ah
(4) Xakamee isbeddelka qaabka dahaarka: Kahor inta aan la dahaadhin, qalooca saamaynta hysteresis ee sunta bartilmaameedka ah ayaa la ururiyaa si socodka hawada ee soo galaya loo xakameeyo xagga hore ee sunta bartilmaameedka ah si loo hubiyo in habku had iyo jeer ku jiro qaabka ka hor inta heerka dhigista uusan hoos u dhicin.

– Maqaalkan waxaa daabacay Guangdong Zhenhua Technology, oo ah shirkad soo saarta qalabka dahaarka faakuumka.