Kedu ihe na-emetụta nsị ebumnuche na sputtering magnetron?

1, Nhazi nke ihe mejupụtara ígwè n'elu ihe mgbaru ọsọ ahụ
Ebee ka e si emepụta ngwakọta ahụ n'usoro nke imepụta ngwakọta site na elu ihe mgbaru ọsọ ígwè site na usoro sputtering reactive? Ebe ọ bụ na mmeghachi omume kemịkalụ dị n'etiti ihe ndị na-eme ka gas na-eme ka ọ dị na mbara ihu na-emepụta atọm ndị mejupụtara, nke na-abụkarị ihe na-eme ka ọ dị na mbara ihu, okpomọkụ mmeghachi omume ahụ ga-enwerịrị ụzọ isi mee ya, ma ọ bụghị ya, mmeghachi omume kemịkalụ ahụ agaghị aga n'ihu. N'ọnọdụ oghere, nnyefe okpomọkụ n'etiti gas agaghị ekwe omume, yabụ mmeghachi omume kemịkalụ ahụ ga-eme n'elu elu siri ike. Ịgbasa mmeghachi omume na-emepụta ngwakọta na elu ihe mgbaru ọsọ, elu ihe owuwu, na elu ihe owuwu ndị ọzọ. Ịmepụta ngwakọta na elu ihe owuwu bụ ebumnuche, imepụta ngwakọta na elu ihe owuwu ndị ọzọ bụ ihe efu, imepụta ngwakọta na elu ihe owuwu ndị ọzọ na-amalite dị ka isi iyi nke atọm ndị mejupụtara ma bụrụ ihe mgbochi iji nọgide na-enye atọm ndị mejupụtara.

2, Ihe ndị na-akpata nsị ebumnuche
Isi ihe na-emetụta nsị ebumnuche bụ oke gas mmeghachi omume na gas na-agbapụta, oke gas mmeghachi omume ga-ebute nsị ebumnuche. A na-eme usoro sputtering reactive na mpaghara ọwa sputtering elu ebumnuche yiri ka compound mmeghachi omume kpuchiri ya ma ọ bụ na a na-ewepụ compound mmeghachi omume ma gosipụta ya ọzọ na elu ígwè. Ọ bụrụ na ọnụego mmepụta compound karịrị ọnụego mwepụ compound, mpaghara mkpuchi compound na-abawanye. Na ike ụfọdụ, oke gas mmeghachi omume nke dị na mmepụta compound na-abawanye ma ọnụego mmepụta compound na-abawanye. Ọ bụrụ na oke gas mmeghachi omume abawanye oke, mpaghara mkpuchi compound na-abawanye. Ọ bụrụ na enweghị ike ịgbanwe ọnụego gas mmeghachi omume n'oge, ọnụego mmụba mpaghara mkpuchi compound anaghị ebelata, a ga-ekpuchikwa ọwa sputtering ahụ ọzọ site na compound ahụ, mgbe ihe ahụ kpuchiri ihe mgbaru ọsọ sputtering zuru oke, ihe mgbaru ọsọ ahụ na-egbu egbu kpamkpam.

3, Ihe na-akpata nsi
(1) mkpokọta ion dị mma: mgbe nsị ebumnuche ahụ gasịrị, a ga-emepụta oyi akwa nke ihe mkpuchi mkpuchi n'elu ihe mgbaru ọsọ ahụ, ion dị mma na-erute elu ihe mgbaru ọsọ cathode n'ihi mkpọchi nke oyi akwa mkpuchi ahụ. Ọ bụghị ịbanye ozugbo na elu ihe mgbaru ọsọ cathode ahụ, kama ọ na-agbakọta n'elu ihe mgbaru ọsọ ahụ, ọ dị mfe ịmepụta ikuku oyi iji gbapụta — arcing, ka cathode sputtering ghara ịga n'ihu.
(2) nkwụsị anode: mgbe nsi a na-achọ, mgbidi ụlọ ikuku a kpụrụ akpụ tinyekwara ihe mkpuchi mkpuchi, ruo na elektrọn anode enweghị ike ịbanye na anode, nhazi nke ihe npụpụ anode.

4, Nkọwa anụ ahụ nke nsị ebumnuche
(1) N'ozuzu, ihe nketa nke abụọ nke ihe ndị mejupụtara ígwè dị elu karịa nke ígwè. Mgbe nsị ihe nkeonwe gasịrị, elu ihe nkeonwe bụ ihe niile mejupụtara ígwè, mgbe ion gbasasịrị ya, ọnụọgụ elektrọn nke abụọ ewepụtara na-abawanye, nke na-eme ka ohere dịkwuo mma ma na-ebelata mgbochi plasma, na-eduga na obere voltaji sputtering. Nke a na-ebelata ọnụego sputtering. N'ozuzu, voltaji sputtering nke magnetron sputtering dị n'etiti 400V-600V, mgbe nsị ihe nkeonwe pụtara, voltaji sputtering na-ebelata nke ukwuu.
(2) Ihe mgbaru ọsọ ígwè na ihe mgbaru ọsọ ogige mbụ dị iche, n'ozuzu ihe mgbaru ọsọ ọdụ ígwè dị elu karịa ihe mgbapụ ọdụ nke ogige ahụ, yabụ ọnụego ọdụ ahụ dị ala mgbe e gbusịrị ya.
(3) Nrụpụta nke gas sputtering reactive dị ala karịa arụmọrụ sputtering nke gas inert, yabụ ọnụego sputtering zuru oke na-ebelata mgbe oke gas reactive mụbara.

5, Ngwọta maka nsị ebumnuche
(1) Nabata ike ọkụ eletrik nke ugboro ole na ole ma ọ bụ ike redio.
(2) Nabata njikwa mkpọchi nke gas na-abata.
(3) Nabata ebumnuche ejima
(4) Jikwaa mgbanwe nke ụdị mkpuchi: Tupu mkpuchi ahụ, a na-anakọta usoro mmetụta hysteresis nke nsị ebumnuche ka e wee chịkwaa ikuku ntinye n'ihu nke na-emepụta nsị ebumnuche iji hụ na usoro ahụ na-adị mgbe niile na ọnọdụ tupu ọnụego ntinye adalata nke ọma.

– Ụlọ ọrụ Guangdong Zhenhua Technology, onye na-emepụta ngwa mkpuchi ikuku, bipụtara akụkọ a.