He aha nā kumu e hoʻopilikia ai i ka make ʻana o ka pahuhopu i ka magnetron sputtering?

1, Hoʻokumu ʻia ʻana o nā hui metala ma ka ʻili o ka pahuhopu
ʻAuhea ka hui i hoʻokumu ʻia i ke kaʻina hana o ka hoʻokumu ʻana i kahi hui mai kahi ʻili metala i manaʻo ʻia e kahi kaʻina hana sputtering reactive? ʻOiai ʻo ka hopena kemika ma waena o nā ʻāpana kinoea reactive a me nā ʻātoma o ka ʻili i manaʻo ʻia e hana i nā ʻātoma hui, kahi mea maʻamau exothermic, pono i ka wela o ka hopena ke ala e holo ai i waho, inā ʻaʻole hiki ke hoʻomau ka hopena kemika. Ma lalo o nā kūlana vacuum, ʻaʻole hiki ke hoʻoili wela ma waena o nā kinoea, no laila pono e hana ka hopena kemika ma kahi ʻili paʻa. Hoʻopuka ka sputtering reaction i nā hui ma nā ʻili i manaʻo ʻia, nā ʻili substrate, a me nā ʻili kūkulu ʻē aʻe. ʻO ka hana ʻana i nā hui ma ka ʻili substrate ka pahuhopu, ʻo ka hana ʻana i nā hui ma nā ʻili kūkulu ʻē aʻe he mea hoʻonele ia i nā kumuwaiwai, a hoʻomaka ka hana ʻana i nā hui ma ka ʻili i manaʻo ʻia ma ke ʻano he kumu o nā ʻātoma hui a lilo i mea pale i ka hoʻolako mau ʻana i nā ʻātoma hui hou aku.

2, Nā kumu hopena o ka lāʻau make i manaʻo ʻia
ʻO ke kumu nui e hoʻopilikia ai i ka lāʻau make i ka pahuhopu, ʻo ia ka lakio o ke kinoea hopena a me ke kinoea sputtering, ʻo ka nui o ke kinoea hopena e alakaʻi ai i ka lāʻau make i ka pahuhopu. Hana ʻia ke kaʻina hana sputtering reactive ma ka ʻili o ke kahawai sputtering i uhi ʻia e ka hui hopena a i ʻole ua wehe ʻia ka hui hopena a hōʻike hou ʻia ka ʻili metala. Inā ʻoi aku ka nui o ka hana ʻana o ka hui ma mua o ka nui o ka wehe ʻana o ka hui, piʻi ka wahi uhi hui. Ma kekahi mana, piʻi ka nui o ke kinoea hopena i komo i ka hana ʻana o ka hui a piʻi ka nui o ka hana ʻana o ka hui. Inā piʻi nui ka nui o ke kinoea hopena, piʻi ka wahi uhi hui. A inā ʻaʻole hiki ke hoʻoponopono ʻia ka nui o ke kahe ʻana o ke kinoea hopena i ka manawa, ʻaʻole i kāohi ʻia ka nui o ka hoʻonui ʻana o ka wahi uhi hui, a e uhi hou ʻia ke kahawai sputtering e ka hui, i ka wā e uhi piha ʻia ai ka pahuhopu sputtering e ka hui, ua make loa ka pahuhopu.

3, ka hanana make ʻana o ka pahuhopu
(1) hōʻiliʻili ion maikaʻi: i ka wā e make ai ka pahuhopu, e hoʻokumu ʻia kahi papa o ka ʻili insulating ma luna o ka ʻili o ka pahuhopu, hiki nā ion maikaʻi i ka ʻili o ka pahuhopu cathode ma muli o ke ālai ʻana o ka papa insulating. ʻAʻole e komo pololei i ka ʻili o ka pahuhopu cathode, akā hōʻiliʻili ma luna o ka ʻili o ka pahuhopu, maʻalahi ka hana ʻana i ke kahua anuanu i ka hoʻokuʻu ʻana o ka arc - arcing, i ʻole e hiki ke hoʻomau ka cathode sputtering.
(2) nalo ʻana o ka anode: i ka wā e make ai ka pahuhopu, ua waiho pū ʻia ka paia o ke keʻena hakahaka i loko o ka ʻili insulating, ʻaʻole hiki ke komo i ka anode a hiki i nā electrons anode, a laila nalowale ka anode.

4, Wehewehe kino o ka lāʻau make i hoʻopaʻa ʻia
(1) Ma keʻano laulā, ʻoi aku ke kiʻekiʻe o ke koina hoʻokuʻu uila lua o nā hui metala ma mua o nā metala. Ma hope o ka make ʻana o ka pahuhopu, ʻo ka ʻili o ka pahuhopu he mau hui metala āpau, a ma hope o ka hoʻokuʻi ʻia ʻana e nā ion, piʻi ka nui o nā electrons lua i hoʻokuʻu ʻia, kahi e hoʻomaikaʻi ai i ka conductivity o ka hakahaka a hoʻemi i ka impedance plasma, e alakaʻi ana i kahi voltage sputtering haʻahaʻa. Hoʻemi kēia i ka helu sputtering. Ma keʻano laulā, ʻo ka voltage sputtering o ka magnetron sputtering ma waena o 400V-600V, a i ka wā e make ai ka pahuhopu, ua hoʻemi nui ʻia ka voltage sputtering.
(2) ʻOkoʻa ka nui o ka sputtering o ka pahuhopu metala a me ka pahuhopu hui i ka wā mua, ma ke ʻano laulā, ʻoi aku ke kiʻekiʻe o ke coefficient sputtering o ka metala ma mua o ke coefficient sputtering o ka hui, no laila ua haʻahaʻa ka nui o ka sputtering ma hope o ka make ʻana o ka pahuhopu.
(3) ʻOi aku ka haʻahaʻa o ka pono o ka sputtering o ke kinoea sputtering reactive ma mua o ka pono o ka sputtering o ke kinoea inert, no laila e emi ana ka nui o ka sputtering piha ma hope o ka piʻi ʻana o ka hapa o ke kinoea reactive.

5, Nā hoʻonā no ka lāʻau make i manaʻo ʻia
(1) E hoʻohana i ka mana uila alapine waena a i ʻole ka mana uila alapine lekiō.
(2) E hoʻohana i ka mana pani o ke kahe ʻana o ke kinoea hopena.
(3) E hoʻohana i nā pahuhopu māhoe
(4) Kāohi i ka hoʻololi ʻana o ke ʻano uhi: Ma mua o ka uhi ʻana, ua hōʻiliʻili ʻia ka piʻo hopena hysteresis o ka lāʻau make i manaʻo ʻia e kāohi ʻia ke kahe ʻana o ka ea komo ma ke alo o ka hana ʻana i ka lāʻau make i manaʻo ʻia e hōʻoia i ka hana mau ʻana o ke kaʻina hana ma ke ʻano ma mua o ka hāʻule nui ʻana o ka helu deposition.

–Ua paʻi ʻia kēia ʻatikala e Guangdong Zhenhua Technology, kahi mea hana o nā lako hana uhi vacuum.