Ndezvipi zvinhu zvinokanganisa chinangwa chepfu mumagnetron sputtering?

1, Kuumbwa kwesimbi inosanganiswa pane inotarirwa pamusoro
Ko musanganiswa unoumbwa papi pakugadzira musanganiswa kubva pane simbi inonangwa neinopopotera?Sezvo kemikari inoitwa pakati peiyo reactive gasi particles uye inotarirwa pamusoro peatomu inogadzira maatomu emukomboni, ayo anowanzo exothermic, kupisa kunopisa kunofanirwa kuve nenzira yekubuda, kana zvikasadaro kemikari haigone kuenderera.Mumamiriro ezvinhu evacuum, kupisa kwekushisa pakati pemagasi hazvigoneki, saka kemikari inogadzirisa inofanira kuitika panzvimbo yakasimba.Reaction sputtering inogadzira makomisheni pane zvakanangwa nzvimbo, substrate nzvimbo, uye mamwe maumbirwo enzvimbo.Kugadzira makomboni panzvimbo yepasi ndicho chinangwa, kugadzira makomboni pane mamwe maumbirwo enzvimbo kutambisa zviwanikwa, uye kugadzira makomboni pane parinotariswa kunotanga sechitubu chemaatomu akakoniwa uye chinova chipingamupinyi kuti chirambe chichipa mamwe maatomu akasanganiswa.

2, Izvo zvinokanganisa zvinhu zvechinangwa chepfu
Chinhu chikuru chinokanganisa chinangwa chechepfu chiyero chekuita gasi uye gasi rinoputika, gasi rakawandisa rekuita rinotungamira kune chepfu.Reactive sputtering process inoitwa munzvimbo yakanangwa sputtering chiteshi inoratidzika kunge yakafukidzwa neiyo reaction compound kana iyo reaction compound inokururwa uye kuburitswazve simbi pamusoro.Kana muyero wekugadzirwa kwemukomboni wakakura kupfuura mwero wekubviswa kwekomboni, nzvimbo yekuvhara yekomboni inowedzera.Pane rimwe simba, huwandu hwekuita gasi rinosanganisirwa mukugadzirwa kwemusanganiswa hunowedzera uye chiyero chechizvarwa chemukomboni chinowedzera.Kana huwandu hwekuita gasi huchiwedzera zvakanyanya, nzvimbo yekuvhara yekomboni inowedzera.Uye kana chiyero chekuyerera kwegasi chisingakwanisi kugadziriswa nenguva, chiyero chekuwedzera kwenzvimbo yekuvhara nzvimbo haisi kudzvinyirirwa, uye sputtering channel inozofukidzwa zvakare nekomboni, apo chinangwa chekuputira chavharwa zvizere nekomboni, chinangwa chacho. zvachose chepfu.

3, Target poisoning phenomenon
(1) positive ion accumulation: kana chinangwa chepfu, chigadziko che insulating firimu chichaumbwa panzvimbo inotarirwa, maion akanaka anosvika pane cathode chinangwa chepamusoro nekuda kwekuvharika kweiyo insulating layer.Kwete zvakananga kupinda cathode chipfuro pamusoro, asi kuunganidza pamusoro chipfuro pamusoro, nyore kubudisa inotonhora munda kuti arc discharge - arcing, kuitira kuti cathode sputtering havagoni kuenderera mberi.
(2) anode kunyangarika: kana chipfuro chepfu, yakadzika vacuum kamuri rusvingo uyewo akaisa insulating firimu, kusvika anode maerekitironi haigoni kupinda anode, paumbwe anode kunyangarika chiitiko.

4, Tsananguro yemuviri yechinangwa chehupfu
(1) Kazhinji, yechipiri electron emission coefficient of metal compounds yakakwirira kudarika yesimbi.Mushure mechepfu yechinangwa, pamusoro pechinangwa ndeye ese masimbi, uye mushure mekubhombwa neiyoni, nhamba yemaerekitironi echipiri anoburitswa inowedzera, izvo zvinovandudza mafambisirwo enzvimbo uye kuderedza plasma impedance, zvichiita kuti magetsi adzike.Izvi zvinoderedza sputtering rate.Kazhinji sputtering voltage yemagnetron sputtering iri pakati pe400V-600V, uye kana chinangwa chepfu chikaitika, sputtering voltage inodzikira zvakanyanya.
(2) Metal target and compound target pekutanga sputtering rate yakasiyana, in general sputtering coefficient yesimbi yakakwirira kudarika sputtering coefficient yecompound, saka sputtering rate yakaderera mushure mechinangwa chepfu.
(3) Kuburitsa gasi reactive sputtering gasi pakutanga kwakadzikira pane kupuruzira gasi inert, saka mwero wakazara wekupuruzira unodzikira mushure mekunge chikamu chegasi rinoshanda rawedzera.

5, Mhinduro dzechinangwa chepfu
(1) Adopt yepakati frequency magetsi magetsi kana redhiyo frequency magetsi.
(2) Gamuchira iyo yakavharwa-loop kutonga kweiyo reaction gasi inopinda.
(3) Gamuchira vavariro mbiri
(4) Dzora shanduko yekupfeka modhi: Usati wapfeka, iyo hysteresis effect curve yechinangwa chepfu inounganidzwa kuitira kuti inlet mhepo inoyerera inodzorwa kumberi kwekugadzira chinangwa chechepfu kuti ive nechokwadi chekuti maitiro anogara ari mumodhi isati yaiswa. chiyero chinodonha zvakanyanya.

-Chinyorwa ichi chakaburitswa naGuangdong Zhenhua Technology, mugadziri wevacuum coating equipment.