Ndezvipi zvinhu zvinokanganisa chepfu inotarirwa mukushandiswa kwemagnetron sputtering?

1, Kuumbwa kwemakemikari esimbi pamusoro pechinhu chinotarirwa
Kombiyuta inoumbwa kupi panguva yekuumbwa kwekombiyuta kubva panzvimbo yesimbi inotarirwa nemaitiro e reactive sputtering? Sezvo maitiro emakemikari pakati pezvikamu zvegasi zvinoita reactive nemaatomu epamusoro anotarirwa achigadzira maatomu akasanganiswa, izvo zvinowanzova exothermic, kupisa kwe reaction kunofanira kunge kune nzira yekuzviburitsa, zvikasadaro maitiro emakemikari haagone kuenderera mberi. Pasi pemamiriro e vacuum, kutamiswa kwekupisa pakati pemagasi hakugoneke, saka maitiro emakemikari anofanira kuitika panzvimbo yakasimba. Kutamiswa kwe reaction kunogadzira makombiyuta panzvimbo dzinotarirwa, nzvimbo dzepasi, nedzimwe nzvimbo dzechimiro. Chinangwa ndechekugadzira makombiyuta pamusoro pe substrate, kugadzira makombiyuta pane dzimwe nzvimbo dzechimiro kutambisa zviwanikwa, uye kugadzira makombiyuta pamusoro pechinhu chinotarirwa kunotanga senzvimbo yemaatomu akasanganiswa uye kunova chipingamupinyi chekuramba uchipa maatomu akawanda akasanganiswa.

2, Zvinhu zvinokonzera chepfu inovavarirwa
Chinhu chikuru chinokanganisa chepfu inotarirwa ihuwandu hwegasi rinoita reaction negasi rinoita sputtering, gasi rinoita reaction rakawandisa rinozokonzera chepfu inotarirwa. Maitiro e reactive sputtering anoitwa munzvimbo yekutarirwa sputtering channel inoita kunge yakafukidzwa ne reaction compound kana kuti reaction compound inobviswa uye inoburitswazve pamusoro pesimbi. Kana mwero wekugadzirwa kwecompound wakakura kupfuura mwero we compound stripping, nzvimbo yekufukidza compound inowedzera. Pasimba rakati, huwandu hwe reaction gas hunobatanidzwa mukugadzirwa kwecompound hunowedzera uye mwero wekugadzirwa kwecompound unowedzera. Kana huwandu hwe reaction gas hukawedzera zvakanyanya, nzvimbo yekufukidza compound inowedzera. Uye kana reaction gas flow rate isingakwanise kugadziriswa nenguva, mwero wekuwedzera kwecompound coverage area haudzivirirwe, uye sputtering channel ichafukidzwa zvakare necompound, kana sputtering target yakafukidzwa zvizere necompound, target inocheneswa zvachose.

3, Chiitiko che chepfu yakarongwa
(1) kuunganidzwa kwemaion akanaka: kana chepfu iri kunangwa, jira refirimu rinodzivirira richaumbwa pamusoro pechinhu chinonangwa, maion akanaka anosvika pamusoro pechinhu chinonangwa necathode nekuda kwekuvharika kwechikamu chinodzivirira. Haapindi zvakananga pamusoro pechinhu chinonangwa necathode, asi anoungana pamusoro pechinhu chinonangwa, zviri nyore kugadzira mhepo inotonhora kubva kuarc discharge — arcing, kuitira kuti cathode sputtering isakwanise kuenderera mberi.
(2) anode kunyangarika: kana chinangwa chepfu, pasi vacuum chamber wall yakachengetwawo insulating firimu, kusvika anode maerekitironi haagoni kupinda anode, anode kunyangarika chiitiko chinoumbwa.

4, Tsananguro yepanyama yechepfu inovavarirwa
(1) Kazhinji, chiyero che secondary electron emission coefficient yesimbi inobuda mumasero chakakwira kupfuura chesimbi. Mushure mekucheneswa nechinhu chinotarwa, pamusoro pechinhu chinotarwa pane simbi chete, uye mushure mekuputirwa nemaion, huwandu hwema secondary electrons anoburitswa hunowedzera, izvo zvinovandudza conductivity yenzvimbo uye zvinoderedza plasma impedance, zvichikonzera kudzikira kwe sputtering voltage. Izvi zvinoderedza mwero wekusputtering. Kazhinji voltage yekusputtering yemagnetron iri pakati pe400V-600V, uye kana chepfu ikaitika, voltage yekusputtering inodzikira zvakanyanya.
(2) Mwero wekusvipa kwesimbi yakanangwa neyakabatana pakutanga wakasiyana, kazhinji mwero wekusvipa kwesimbi wakakwira kupfuura mwero wekusvipa kwesimbi yakabatana, saka mwero wekusvipa wakaderera mushure mekuchetura.
(3) Kushanda zvakanaka kwegasi rinoita zvekupfapfaidza rinotanga rakaderera pane kushanda zvakanaka kwegasi risingashande, saka mwero wekupfapfaidza wakazara unoderera mushure mekunge huwandu hwegasi rinoita zvekupfapfaidza hwawedzera.

5, Mhinduro dzekushandisa chepfu yakanangana
(1) Shandisa simba remagetsi remafrequency ari pakati nepakati kana redhiyo.
(2) Shandisa nzira yekudzora kupinda kwegasi rinoita kuti ripinde.
(3) Tora zvinangwa zviviri
(4) Dzora shanduko yemodhi yekuputira: Usati waputira, hysteresis effect curve yechepfu inounganidzwa kuitira kuti kuyerera kwemhepo inopinza kudzorwe pamberi pekugadzira chepfu kuitira kuve nechokwadi chekuti maitiro acho anogara ari mumodhi usati wadzikira zvakanyanya.

–Chinyorwa ichi chakaburitswa neGuangdong Zhenhua Technology, kambani inogadzira michina yekuputira vacuum.