- Tignoolajiyada kulaylka ee CVD
Dahaarka adag inta badan waa daahan dhoobada bir ah (TiN, iwm), kuwaas oo ka samaysan falcelinta birta ee daahan iyo falcelinta gaas. Markii hore, tignoolajiyada kulaylka ee CVD waxaa loo isticmaalay in lagu bixiyo tamarta firfircoonida ee falcelinta isku-darka tamarta kulaylka heerkul sare oo 1000 ℃ ah. Heerkulkani wuxuu kaliya ku habboon yahay in la dhigo TiN iyo dahaarka kale ee adag ee qalabka carbide sibidhka. Ilaa hadda, weli waa tignoolajiyada muhiimka ah ee lagu kaydiyo TiN - Al2O3 dahaarka isku dhafan ee madaxyada qalabka karbide ee sibidhka.
- Dahaarka ion cathode godan iyo dahaarka arc ion silig kulul
Sannadihii 1980-aadkii, dahaarka cathode ion ee godan iyo daahan siligga kulul ee arc ion ayaa loo isticmaalay in lagu xareeyo qalabka goynta dahaarka leh. Labadan tikniyoolajiyada daahan ion-ka ah waa tikniyoolajiyadda dahaarka arc ee daahan, oo leh heerka ionization birta ilaa 20% ~ 40%.
- Cathode arc ion daahan
Soo ifbaxa cathodic arc ion cating ayaa horseeday horumarinta tignoolajiyada lagu dhejiyo dahaarka adag ee caaryada. Heerka ionization ee daahan cathodic arc ion waa 60% ~ 90%, jidaynayey tiro badan oo ah ion biraha iyo ion gaaska falcelinta si ay u gaaraan dusha sare ee workpiece iyo weli sii wadaan hawlaha sare, taasoo keentay in dhigaalka falcelinta iyo samaynta daahan adag sida TiN. Waqtigan xaadirka ah, tignoolajiyada dahaarka cathodic arc ion waxaa inta badan loo isticmaalaa in lagu shubo dahaarka adag ee caaryada.
Isha cathode arc waa il uumi-dhal ah oo adag oo aan lahayn barkad dhalaalaysa oo go'an, iyo booska isha arc waxaa loo dhigi karaa si sabab la'aan ah, hagaajinta heerka isticmaalka booska qolka dahaarka iyo kordhinta awoodda rarka foornada. Qaababka ilaha cathode arc waxaa ka mid ah ilo yar oo cathode ah oo wareeg ah, ilaha arc ee tiirarka, iyo ilo fidsan oo waaweyn oo leydi ah. Qaybaha kala duwan ee ilaha yar yar ee arc, ilaha arc ee tiirarka, iyo ilaha waaweyn ee arc ayaa si gooni ah loo habayn karaa si loo dhigo filimada lakabyada badan iyo filimada nano multilayer. Dhanka kale, ay sabab u tahay heerka sare ee ionization biraha ee daahan cathodic arc ion, ions biraha nuugi karaan gaasaska falcelin dheeraad ah, taasoo keentay in kala duwan ee geedi socodka ballaaran iyo hawlgalka fudud si aad u hesho daahan adag aad u fiican. Si kastaba ha ahaatee, waxaa jira dhibco qallafsan oo ku jira qaab-dhismeedka yar-yar ee lakabka daahan ee laga helay daahan cathodic arc ion. Sanadihii la soo dhaafay, teknoolojiyad cusub oo badan ayaa soo baxay si loo nadiifiyo qaab dhismeedka lakabka filimka, taas oo wanaajisay tayada filimka dahaarka arc ion.
Waqtiga boostada: Jul-20-2023