Plasma Yakasimudzira Chemical Vapor Deposition Chitsauko 1

Chemical Vapor Deposition (CVD). Sezvinoreva zita, inzira inoshandisa gaseous precursor reactants kugadzira mafirimu akasimba kuburikidza neatomu uye intermolecular chemical reaction. Kusiyana nePVD, iyo CVD maitiro anonyanya kuitirwa munzvimbo yepamusoro (yakaderera vacuum) nharaunda, ine yakanyanya kudzvanywa iri kushandiswa kunyanya kuwedzera deposition rate yefirimu. Kemikari vapor deposition inogona kuiswa muzvikamu zveCVD (inozivikanwawo se thermal CVD) uye plasma-enhanced chemical vapor deposition (Plasma-Enhanced Chemical Vapor Deposition. PECVD) zvichienderana nokuti plasma inobatanidzwa here mukugadzirisa. Ichi chikamu chinotarisa tekinoroji yePECVD inosanganisira maitiro ePECVD uye midziyo inowanzo shandiswa yePECVD uye musimboti wekushanda.

Plasma-enhanced chemical vapor deposition inzira yakatetepa-yefirimu kemikari vapor deposition iyo inoshandisa plasma inopenya yekuburitsa kuita pesvedzero padanho rekuisa apo iyo yepasi-kumanikidza kemikari vapor deposition process iri kuitika. Mupfungwa iyi, yakajairwa CVD tekinoroji inotsamira pane yakakwira substrate tembiricha kuti ione kemikari inoita pakati pegasi chikamu zvinhu uye kuiswa kwemafirimu matete, uye nekudaro inogona kunzi thermal CVD tekinoroji.

Muchigadzirwa chePECVD, gasi rinoshanda rinenge 5 ~ 500 Pa, uye kuwanda kwemaerekitironi neioni kunogona kusvika 109 ~ 1012 / cm3, nepo avhareji simba rema electrons rinogona kusvika 1 ~ 10 eV. Chii chinosiyanisa nzira yePECVD kubva kune dzimwe nzira dzeCVD ndeyokuti plasma ine nhamba huru ye-high-energy electrons, iyo inogona kupa simba rekuita rinodiwa kune kemikari vapor deposition process. Iko kudhumhana kwemaerekitironi uye gasi-chikamu mamorekuru anogona kusimudzira kuparara, chemosynthesis, excitation uye ionization maitiro emamorekuru egasi, achigadzira mapoka emakemikari anoshanda zvakanyanya, nokudaro achidzikisa zvakanyanya tembiricha yeCVD yakaonda firimu deposition, zvichiita kuti zvikwanise kuona maitiro eCVD, ayo anodiwa kutanga aitwe pakupisa kwakadzika. Mukana wekudziya kwakadzika tembiricha yakaonda firimu deposition ndeyekuti inogona kudzivirira kupararira kusingakodzeri uye kuita kwemakemikari pakati pefirimu neiyo substrate, shanduko yezvimiro uye kuparara kwefirimu kana substrate zvinhu, uye hukuru hwekupisa kupisa mufirimu uye substrate.

-Chinyorwa ichi chakaburitswa navacuum coating machine mugadziriGuangdong Zhenhua