Kune nzira mbiri huru dzekuisa ion beam-assisted deposition, imwe idynamic hybrid; imwe istatic hybrid. Yekutanga inoreva firimu iri mukukura kwayo inogara ichiperekedzwa nesimba rakati uye beam current yeion bombardment nefirimu; yekupedzisira inoiswa pamusoro pe substrate layer ine ukobvu husingasviki nanometers mashoma efirimu layer, uye ipapo dynamic ion bombardment, uye inogona kudzokororwa kakawanda uye kukura kwefirimu layer.
Simba remaion beam rinosarudzwa kuti rishandiswe pakuisa mafirimu matete riri pakati pe30 eV kusvika 100 keV. Simba rinosarudzwa rinoenderana nerudzi rwekushandiswa kuri kuitwa firimu. Semuenzaniso, kugadzirira dziviriro yekuora, kupfeka kwemechanical, machira ekushongedza uye mamwe mafirimu matete kunofanirwa kusarudzwa simba repamusoro rekuputika. Kuedza kunoratidza kuti, sekusarudzwa kwesimba re20 kusvika 40keV rekuputika kwebhomu reion beam, zvinhu zve substrate nefirimu pachayo hazvizokanganisi mashandiro uye kushandiswa kwekukuvara. Mukugadzirira mafirimu matete emidziyo ye optical neyemagetsi, simba rakaderera rekuisa ion beam beam rinofanirwa kusarudzwa, izvo zvisingangoderedzi kusviba kwechiedza uye kudzivirira kuumbwa kwezvikanganiso zvinoshandiswa nemagetsi, asiwo zvinorerutsira kuumbwa kwechimiro che membrane chakagadzikana. Zvidzidzo zvakaratidza kuti mafirimu ane hunhu hwakanaka anogona kuwanikwa nekusarudza simba remaion riri pasi pe500 eV.
–Chinyorwa ichi chakaburitswa namugadziri wemuchina wevacuum coatingGuangdong Zhenhua
Nguva yekutumira: Kurume-11-2024