Uburyo bwo gushyiramo ingufu hakoreshejwe icyuma gifasha amashanyarazi cya Ion hamwe n'uburyo gikoreshwa mu guhitamo ingufu

Hari uburyo bubiri bw'ingenzi bwo gushyiramo imirasire ya ion, bumwe ni dynamic hybrid; ubundi ni static hybrid. Ubwa mbere buvuga ko filime mu nzira yo gukura ihora iherekejwe n'ingufu runaka n'umuyoboro w'imirasire ya ion na filime; ubwa nyuma bushyirwa ku buso bwa substrate urwego rufite ubugari bwa nanometero nkeya z'urwego rwa filime, hanyuma dynamic ion bombardment, kandi bishobora gusubirwamo inshuro nyinshi no gukura k'urwego rwa filime.

Ingufu z'imirasire ya ion zatoranijwe mu gushyiramo imirasire ya ion mu mafirime yoroheje ziri hagati ya 30 eV na 100 keV. Ingufu zatoranijwe ziterwa n'ubwoko bw'ikoreshwa rya firime. Urugero, gutegura uburyo bwo kurinda ingese, kwangirika kw'ibyuma, gusiga imitako n'izindi firime zoroheje bigomba gutoranywamo ingufu nyinshi zo gutera. Igerageza ryerekana ko, nko guhitamo ingufu za 20 kugeza kuri 40keV zo guteramo imirasire ya ion, ibikoresho bya substrate na firime ubwayo bitazagira ingaruka ku mikorere n'ikoreshwa ry'ibyangiritse. Mu gutegura firime zoroheje ku bikoresho by'ikoranabuhanga n'iby'ikoranabuhanga, hagomba gutoranywa ingufu nke zo guteramo imirasire ya ion, ibyo bikaba bigabanya gusa kwinjizwa k'urumuri no kwirinda ko habaho inenge zikoreshwa n'amashanyarazi, ahubwo binafasha mu ikorwa ry'imiterere ihamye y'urukiramende. Ubushakashatsi bwagaragaje ko firime zifite imiterere myiza zishobora kuboneka uhisemo ingufu za ion ziri munsi ya 500 eV.

–Iyi nkuru yasohotse nauruganda rukora imashini zikora imashini zikoresha umwuka ushyushyeGuangdong Zhenhua