Njira yogwiritsira ntchito mphamvu ya ion beam ndi kusankha kwake mphamvu

Pali njira ziwiri zazikulu zoperekera kuwala kwa ion beam-assisted deposition, imodzi ndi dynamic hybrid; inayo ndi static hybrid. Yoyamba imatanthauza kuti filimuyi ikukula nthawi zonse imayenda ndi mphamvu inayake ndi mphamvu ya ion bombardment ndi filimu; yomalizayi imayikidwa kale pamwamba pa substrate wosanjikiza wosanjikiza wosanjikiza wosanjikiza wa nanometers ochepa wa filimu, kenako dynamic ion bombardment, ndipo ikhoza kubwerezedwa kangapo ndi kukula kwa filimu.

Mphamvu za ion beam zomwe zasankhidwa kuti zigwiritsidwe ntchito poika mafilimu opyapyala a ion beam zili pakati pa 30 eV ndi 100 keV. Mphamvu zomwe zasankhidwa zimadalira mtundu wa ntchito yomwe filimuyo ikugwiritsidwa ntchito. Mwachitsanzo, kukonzekera chitetezo cha dzimbiri, kuvala kotsutsana ndi makina, zokutira zokongoletsera ndi mafilimu ena opyapyala kuyenera kusankhidwa kukhala mphamvu yapamwamba kwambiri yopangira mabomba. Mayesero akusonyeza kuti, monga kusankha mphamvu ya 20 mpaka 40keV ya ion beam bombardment, zinthu zapansi ndi filimuyo sizikhudza magwiridwe antchito ndi kugwiritsa ntchito kuwonongeka. Pokonzekera mafilimu opyapyala a zida zamagetsi ndi zamagetsi, ion beam assisted deposition yotsika mphamvu iyenera kusankhidwa, zomwe sizimangochepetsa kuyamwa kwa kuwala ndikupewa kupangika kwa zolakwika zamagetsi, komanso zimathandiza kupanga kapangidwe ka nembanemba kokhazikika. Kafukufuku wasonyeza kuti mafilimu okhala ndi makhalidwe abwino kwambiri amatha kupezeka posankha mphamvu ya ion yochepera 500 eV.

– Nkhaniyi yatulutsidwa ndiwopanga makina ophikira vacuumGuangdong Zhenhua