Pane nzira mbiri huru dzeion beam-assisted deposition, imwe ine dynamic hybrid; imwe yacho ndeye static hybrid. Iyo yekare inoreva iyo firimu mukukura kwekukura inogara ichiperekedzwa neimwe simba uye danda ikozvino yeion bombardment uye firimu; iyo yekupedzisira inofanoiswa pamusoro peiyo substrate dhizaini isingasviki mashoma mashoma nanometer ukobvu hwefirimu layer, uye ipapo dynamic ion bombardment, uye inogona kudzokororwa kakawanda uye kukura kweiyo firimu layer.
Ion beam simba rinosarudzirwa ion danda rinobatsira kuiswa kwemafirimu matete ari mumhando ye30 eV kusvika 100 keV. Rudzi rwesimba rinosarudzwa rinoenderana nerudzi rwekushandisa iyo firimu iri kugadzirwa. Semuenzaniso, kugadzirira kwekudzivirira kwehutu, anti-mechanical kupfeka, machira ekushongedza uye mamwe mafirimu akaonda anofanira kusarudzwa yakakwirira bombardment simba. Ongororo dzinoratidza kuti, sekusarudzwa kwe20 kusvika 40keV simba reiyo ion beam bombardment, iyo substrate zvinhu uye iyo firimu pachayo haizokanganisa kuita uye kushandiswa kwekukuvadza. Mukugadzirira kwemafirimu akaonda emidziyo yemagetsi uye yemagetsi, yakaderera simba ion danda rinobatsira kuiswa kunofanirwa kusarudzwa, izvo zvisingangodzikisire kupenya kwechiedza uye kudzivirira kuumbwa kwemagetsi activated hurema, asi zvakare kufambisa kuumbwa kweiyo membrane yakagadzikana mamiriro emamiriro. Zvidzidzo zvakaratidza kuti mafirimu ane zvivakwa zvakanakisa anogona kuwanikwa nekusarudza ion simba rakaderera pane 500 eV.
-Chinyorwa ichi chakaburitswa navacuum coating machine mugadziriGuangdong Zhenhua
Nguva yekutumira: Mar-11-2024