Kana kuiswa kwe membrane maatomu kwatanga, ion bombardment ine zvinotevera zvinokonzeresa pane membrane/substrate interface.
(1) Kusanganiswa kwenyama. Nekuda kwejekiseni re-ion-energy, kupuruzirwa kwemaatomu akaiswa uye jekiseni recoil remaatomu epamusoro uye kudhumhana kwechiitiko, zvinokonzeresa nzvimbo yepedyo-yepamusoro yemembrane/ base interface ye substrate element uye membrane zvinhu zvekusa-diffusion kusanganiswa, uku kusanganisa kuchaita kunobatsira pakuumbwa kwe "membranedif" layer, iyo membranedif layer/ pakati pe membrane/ base interface, kusvika kune mashoma mamicrons gobvu. Ma micrometer mashoma akakora, umo zvikamu zvitsva zvinogona kuoneka. Izvi zvakanakira kuvandudza simba rekunamatira re membrane / base interface.
(2) Kuwedzera kupararira. Iyo yakanyanya kuremara yekumisikidza munharaunda yepedyo-yepamusoro uye tembiricha yepamusoro inowedzera chiyero chekupararira. Sezvo kumusoro kuri kuremara, maion madiki ane katsika kekutsveta pamusoro, uye ion bombardment ine mhedzisiro yekuwedzera kuwedzeredza kwepasi uye kusimudzira kuparadzaniswa kwemaatomu akaiswa uye e substrate.
(3) Kuvandudza nucleation mode. Hunhu hweatomu hwakakonyedzwa pamusoro pe substrate surface inotariswa nekudyidzana kwayo kwepamusoro uye nekutama kwayo kwepamusoro. Kana pasina kudyidzana kwakasimba pakati peatomu rakakonyeswa nepamusoro pe substrate, atomu inopararira pamusoro kusvika yaita nucleate panzvimbo ine simba guru kana kuti yadhumhana nemamwe maatomu ari kupararira. Iyi nzira ye nucleation inonzi non-reactive nucleation. Kunyange kana yepakutanga iri yenyaya ye-non-reactive nucleation mode, ne ion bombardment ye substrate surface inogona kubereka kukanganisa kwakawanda, kuwedzera nucleation density, iyo inobatsira pakugadzirwa kwekupararira - reactive nucleation mode.
(4) Kusarudzwa kubviswa kwemaatomu akasungwa zvakasununguka. Kuputika kwemaatomu epamusoro kunotemerwa nenharaunda yekubatana kwenzvimbo, uye bhomba reiyoni repamusoro rinowanzo kubudisa maatomu akasungwa zvisina kusimba. Izvi zvinonyanya kutaurwa mukugadzirwa kwediffusion-reactive interfaces.
(5) Kuvandudzwa kwekuvhara kwepamusoro uye kukwidziridzwa kweplating bypass. Nekuda kweiyo yakanyanya kushanda gasi kudzvanywa kweion plating, maatomu akaputika kana akapushwa anoiswa pasi pekubonderana nemaatomu egasi kuti awedzere kupararira, zvichikonzera kuputira kwakanaka-kupoterera zvivakwa.
-Chinyorwa ichi chakaburitswa navacuum coating machine mugadziriGuangdong Zhenhua
Nguva yekutumira: Zvita-09-2023