Plasma Yongerewe Imyuka Yumuyaga Umutwe 1

Kubika imyuka ya chimique (CVD). Nkuko izina ribivuga, ni tekinike ikoresha gaze ya preursor reaction kugirango ikore firime zikomeye hakoreshejwe imiti ya atome na intermolecular. Bitandukanye na PVD, inzira ya CVD ikorwa cyane cyane mukirere cyinshi (vacuum yo hepfo), hamwe numuvuduko mwinshi ukoreshwa cyane cyane kugirango wongere igipimo cya firime. Imyuka ya chimique irashobora gushyirwa mubice rusange bya CVD (bizwi kandi nka CVD yumuriro) hamwe na plasma yongerewe imbaraga mumashanyarazi (Plasma-Enhanced Chemical Vapor Deposition. PECVD) ukurikije niba plasma igira uruhare mubikorwa byo kubitsa. Iki gice cyibanze ku ikoranabuhanga rya PECVD harimo inzira ya PECVD hamwe nibikoresho bisanzwe bikoreshwa na PECVD hamwe nihame ryakazi.

Plasma yongerewe imbaraga mumyuka ya chimique nubuhanga bwo kubika imyuka mvaruganda yoroheje ikoreshwa na plasma ikoresha glow isohora plasma kugirango igire uruhare mubikorwa byo kuyishira mugihe gahunda yo guta imyuka yumuvuduko muke irimo gukorwa. Ni muri urwo rwego, ikoranabuhanga risanzwe rya CVD rishingiye ku bushyuhe bwo hejuru bw’ubutaka kugira ngo hamenyekane imiterere y’imiti hagati y’ibintu bya gaze no kohereza firime zoroshye, bityo bikaba byitwa tekinoroji ya CVD.

Mu gikoresho cya PECVD, umuvuduko wa gazi ukora ni 5 ~ 500 Pa, kandi ubucucike bwa electron na ion bushobora kugera kuri 109 ~ 1012 / cm3, mugihe ingufu zisanzwe za electron zishobora kugera kuri 1 ~ 10 eV. Ikitandukanya uburyo bwa PECVD nubundi buryo bwa CVD nuko plasma irimo umubare munini wa electron zifite ingufu nyinshi, zishobora gutanga ingufu zo gukora zikenewe mugikorwa cyo guta imyuka ya chimique. Isanganya rya electron na molekile ya gaze irashobora guteza imbere kubora, chemosynthesis, kwishima hamwe na ionisiyonike ya molekile ya gaze, bikabyara amatsinda yimiti ikora cyane, bityo bikagabanya cyane ubushyuhe bwubushyuhe bwa firime ya CVD yoroheje, bigatuma bishoboka kumenya inzira ya CVD, isabwa mbere na mbere gukorwa mubushyuhe bwinshi, mubushyuhe buke. Ibyiza byubushyuhe buke bwa firime ni uko ishobora kwirinda gukwirakwizwa bitari ngombwa hamwe nubushakashatsi bwimiti hagati ya firime na substrate, impinduka zimiterere no kwangirika kwa firime cyangwa ibikoresho bya substrate, hamwe nubushyuhe bukabije bwumuriro muri firime na substrate.

–Iyi ngingo yasohowe naimashini ikora imashiniGuangdong Zhenhua