Ion beam yafashijwe uburyo bwo kubika no guhitamo ingufu

Hariho uburyo bubiri bwibanze bwa ion beam-ifashijwe kubitsa, imwe ni dinamike ivanze; ikindi ni static hybrid. Iyambere yerekeza kuri firime mugikorwa cyo gukura ihora iherekejwe ningufu runaka nigitereko cyumuriro wa ion bombardment na firime; icya nyuma cyashyizwe mbere yubuso bwa substrate igipande cyuburebure bwa nanometero nkeya zuburebure bwa firime, hanyuma igatera ion ion bombardment, kandi irashobora gusubirwamo inshuro nyinshi no gukura kwa firime.

Ingufu za ion beam zatoranijwe kuri ion beam zifasha gushira firime yoroheje ziri murwego rwa 30 eV kugeza 100 keV. Ingufu zingufu zatoranijwe ziterwa nubwoko bwa porogaramu firime ikorerwamo. Kurugero, gutegura kurinda ruswa, kwambara anti-mashini, gutwika imitako hamwe nizindi firime zoroshye bigomba gutoranywa ingufu zisumba ibisasu. Ubushakashatsi bwerekana ko, nko guhitamo ingufu za 20 kugeza 40keV zatewe na ion beam bombardment, ibikoresho bya substrate na firime ubwayo ntibizagira ingaruka kumikorere no gukoresha ibyangiritse. Mugutegura firime yoroheje kubikoresho bya optique na elegitoronike, hagomba gutoranywa ingufu nkeya ion beam ifashwa kubitsa, ibyo ntibigabanya gusa urumuri rwumucyo kandi birinda no gukora inenge zikoreshwa namashanyarazi, ariko kandi byoroshya gushiraho imiterere ya leta ihagaze neza. Ubushakashatsi bwerekanye ko firime zifite imiterere myiza zishobora kuboneka muguhitamo ingufu za ion ziri munsi ya 500 eV.

–Iyi ngingo yasohowe naimashini ikora imashiniGuangdong Zhenhua