Ingaruka za ion bombardment kuri firime ya layer / substrate

Iyo gushira kwa atome ya membrane itangiye, ion bombardment igira ingaruka zikurikira kuri membrane / substrate.

(1) Kuvanga kumubiri. Kubera inshinge zifite ingufu nyinshi, gusuka kwa atome zabitswe hamwe no gutera inshinge za atome zo hejuru hamwe na casade yo kugongana, bizatera agace kegereye ubuso bwa membrane / base yimbere yibintu bya substrate nibintu bya membrane bitavanze, iyi ngaruka yo kuvanga bizabafasha gushiraho imiterere ya membrane / base base ya interineti, pseudo-diffusion layer ", ni ibice bito bito, ni ibice bito bito, ni ibice bito, ni ibice bito, ni ibice bito, ni ibice bito bito, Micrometero nkeya, aho ibyiciro bishya bishobora no kugaragara. Nibyiza cyane kunoza imbaraga zifatika za membrane / base base.

(2) Gukwirakwiza gukwirakwizwa. Ubusembwa bukabije mu karere kegereye ubuso n'ubushyuhe bwo hejuru byongera igipimo cyo gukwirakwizwa. Kubera ko ubuso ari inenge, ion ntoya ifite imyumvire yo gutandukana hejuru, kandi ibisasu bya ion bigira ingaruka zo kurushaho kuzamura ubuso no kuzamura ikwirakwizwa rya atome zabitswe na substrate.

(3) Uburyo bwiza bwa nucleation. Imiterere ya atome yegeranye hejuru yubutaka igenwa nubuso bwayo hamwe nimiterere yimuka hejuru. Niba nta mikoranire ikomeye iri hagati ya atome yegeranye hamwe nubuso bwa substrate, atom izakwirakwira hejuru kugeza igihe izunguruka ahantu hafite ingufu nyinshi cyangwa igahura nizindi atome zikwirakwizwa. Ubu buryo bwa nucleation bwitwa non-reaction nucleation. Nubwo umwimerere ari uw'uburyo bwa nucleation idakorwa neza, ukoresheje ion ibisasu bya ion hejuru yubutaka bwa substrate birashobora kubyara inenge nyinshi, bikongera ubwinshi bwa nucleation, bikaba byiza cyane muburyo bwo gukwirakwiza - uburyo bwa nucleation reaction.

(4) Gukuraho byimazeyo atome zifunze. Isohora rya atome yo hejuru igenwa na leta ihuza ibihugu, kandi ion ibisasu hejuru yubutaka birashoboka cyane ko bisohora atome zifitanye isano. Ingaruka zigaragara cyane muburyo bwo gukwirakwiza intera-reaction.

(5) Gutezimbere ubwuzuzanye no kuzamura plaque bypass. Bitewe numuvuduko mwinshi wa gazi ikora ya plaque ya ion, atome zumuyaga cyangwa zisukuye zirashobora kugongana na atome ya gaze kugirango zongere gutatanya, bikavamo ibintu byiza bipfunyika.

–Iyi ngingo yasohowe naimashini ikora imashiniGuangdong Zhenhua