Lamulo la kukula kwa filimu yophimba vacuum evaporation

Pa nthawi yopaka utoto wa evaporation, kukula kwa filimu ndi kukula kwake ndiye maziko a ukadaulo wosiyanasiyana wopaka utoto wa ion.

1. Kuphatikizika kwa nyukiliya

Inukadaulo wokutira wa vacuum evaporationPambuyo poti tinthu ta filimu tasanduka nthunzi kuchokera ku gwero la nthunzi mu mawonekedwe a maatomu, timauluka mwachindunji kupita ku workpiece mu vacuum yapamwamba ndikupanga firimu la utsi pogwiritsa ntchito nucleation ndi kukula pamwamba pa workpiece. Pa nthawi ya nthunzi ya vacuum, mphamvu ya maatomu a filimu layer omwe amatuluka kuchokera ku gwero la nthunzi ndi pafupifupi 0.2eV. Pamene mgwirizano pakati pa tinthu ta filimu layer uli waukulu kuposa mphamvu yolumikizana pakati pa maatomu a workpiece ndi workpiece, amapanga chisumbu cha pachilumba. Atomu ya filimu layer imodzi imakhala pamwamba pa workpiece kwa nthawi yayitali ikuchita kuyenda kosasinthasintha, kufalikira, kusamuka, kapena kugundana ndi maatomu ena kuti apange magulu a atomu. Chiwerengero cha maatomu mu gulu la atomu chimafika pamtengo wofunikira, nucleus yokhazikika imapangidwa, yotchedwa nucleus yofanana.

Yosalala, ndipo ili ndi zolakwika zambiri ndi masitepe, zomwe zimapangitsa kusiyana kwa mphamvu yotsatsira ya magawo osiyanasiyana a workpiece ku maatomu a radioactive. Mphamvu yotsatsira ya pamwamba pa defect ndi yayikulu kuposa ya pamwamba wamba, kotero imakhala malo ogwirira ntchito, omwe amathandiza nucleation yosankhidwa, yotchedwa heterogeneous nucleation. Pamene mphamvu yogwirizana ili yofanana ndi mphamvu yomangirira, kapena mphamvu yomangira pakati pa maatomu a membrane ndi workpiece ili yayikulu kuposa mphamvu yogwirizana pakati pa maatomu a membrane, kapangidwe ka lamellar kamapangidwa. Mu ukadaulo wa ion plating, chilumba chapakati chimapangidwa nthawi zambiri.

2. Kukula

Pakati pa filimuyi pakakhala kuti papangidwa, imapitiriza kukula mwa kugwira maatomu omwe amachitika. Zilumbazi zimakula ndikugwirizana kuti zipange madera akuluakulu, pang'onopang'ono kupanga gawo la chilumba cha hemispherical lomwe limafalikira pamwamba pa ntchito.

Pamene mphamvu ya atomiki ya gawo la filimu ili yokwera, imatha kufalikira mokwanira pamwamba ndipo filimu yosalala yopitilira imatha kupangidwa pamene magulu a atomiki otsatirawa ali ang'onoang'ono. Ngati kufalikira kwa maatomu pamwamba kuli kofooka ndipo kukula kwa magulu osungidwa ndi kwakukulu, amakhala ngati ma nuclei akuluakulu a peninsular. Pamwamba pa chilumbachi pali mphamvu yamphamvu yophimba mbali yokhota, ndiko kuti "mthunzi". Kuwonekera kwa pamwamba kumakhala kothandiza kwambiri kuti maatomu osungidwa pambuyo pake agwire ndikukula bwino, zomwe zimapangitsa kuti kuchuluka kwa kupindika pamwamba kukhale kofanana kapena kozungulira kokwanira. Malo olowa mkati amapangidwa pakati pa makristasi okhota ndipo kuchuluka kwa kukhwima kwa pamwamba kumawonjezeka. Minofu yopyapyala ingapezeke pa vacuum yayikulu, ndi kuchepa kwa digiri ya vacuum, kapangidwe ka micromembrane kamakhala kokulirapo.