Kuyika kwa Mpweya wa Mankhwala Owonjezera a Plasma Mutu 1

Chemical Vapor Deposition (CVD). Monga momwe dzinalo likusonyezera, ndi njira yomwe imagwiritsa ntchito ma gaseous precursor reactants kupanga mafilimu olimba pogwiritsa ntchito ma atomiki ndi ma intermolecular chemical reaction. Mosiyana ndi PVD, njira ya CVD nthawi zambiri imachitika pamalo oponderezedwa kwambiri (otsika vacuum), kukakamiza kwakukulu kumagwiritsidwa ntchito makamaka kukulitsa kuchuluka kwa filimuyo. Kuyika kwa nthunzi wa mankhwala kungagawidwe mu CVD (yomwe imadziwikanso kuti thermal CVD) ndi plasma-enhanced chemical vapor deposition (Plasma-Enhanced Chemical Vapor Deposition. PECVD) kutengera ngati madzi a m'magazi amakhudzidwa ndi kuyika. Gawoli limayang'ana paukadaulo wa PECVD kuphatikiza njira ya PECVD ndi zida zomwe zimagwiritsidwa ntchito kwambiri ndi PECVD ndi mfundo yogwirira ntchito.

Kuyika kwa nthunzi wa mankhwala a plasma ndi njira yochepetsera mpweya wa filimu ya mankhwala yomwe imagwiritsa ntchito madzi a m'magazi a plasma kuti ikhale ndi chikoka pa kakhazikitsidwe kake pamene njira yoyika nthunzi yotsika ya mankhwala ikuchitika. M'lingaliro limeneli, ukadaulo wamba wa CVD umadalira kutentha kwa gawo lapansi kuti azindikire momwe zinthu zimachitikira pakati pa zinthu zagasi ndi kuyika kwamafilimu oonda, motero ukadaulo wamafuta a CVD.

Mu chipangizo cha PECVD, mphamvu ya gasi yogwira ntchito ndi pafupifupi 5 ~ 500 Pa, ndipo kachulukidwe ka ma electron ndi ma ion amatha kufika 109 ~ 1012 / cm3, pamene mphamvu yamagetsi imatha kufika 1 ~ 10 eV. Chomwe chimasiyanitsa njira ya PECVD ndi njira zina za CVD ndikuti plasma ili ndi ma elekitironi ochuluka kwambiri, omwe angapereke mphamvu yotsegulira yofunikira pa ndondomeko yoyika nthunzi ya mankhwala. The kugunda ma elekitironi ndi mpweya gawo mamolekyu akhoza kulimbikitsa kuwonongeka, chemosynthesis, malemeredwe ndi njira ionization wa mamolekyu mpweya, kupanga kwambiri zotakasika magulu mankhwala, motero kuchepetsa kwambiri kutentha osiyanasiyana CVD woonda filimu mafunsidwe, kupanga n`zotheka kuzindikira ndondomeko CVD, amene poyamba chofunika kuchitidwa pa kutentha otsika, pa kutentha otsika. Ubwino wocheperako kutentha kwa filimu yopyapyala ndikuti imatha kupewa kufalikira kosafunikira komanso kusintha kwamankhwala pakati pa filimuyo ndi gawo lapansi, kusintha kwamapangidwe ndi kuwonongeka kwa filimuyo kapena gawo lapansi, komanso kupsinjika kwakukulu kwamafuta mufilimuyo ndi gawo lapansi.

-Nkhaniyi yatulutsidwa ndiwopanga makina opangira vacuumGuangdong Zhenhua