Njira zokhazikika zoyika zokutira zolimba

1. Thermal CVD Technology

Zotchingira zolimba nthawi zambiri zimakhala zokutira zachitsulo za ceramic (TiN, etc.), zomwe zimapangidwa ndi zomwe zitsulo zimachita pakupaka ndi kutulutsa mpweya. Poyamba, ukadaulo wamatenthedwe wa CVD udagwiritsidwa ntchito popereka mphamvu yoyambitsa ya Combination reaction ndi mphamvu yamafuta pa kutentha kwakukulu kwa 1000 ℃. Kutentha kumeneku ndikoyenera kuyika TiN ndi zokutira zina zolimba pazida zomata za carbide. Pakadali pano, akadali ukadaulo wofunikira pakuyika zokutira zamagulu a TiN - Al2O3 pamitu ya zida zama carbide.

1. Chophimba cha ion cathode ndi zokutira za waya otentha za arc ion

M'zaka za m'ma 1980, zokutira za cathode ion ndi zokutira za waya otentha zidagwiritsidwa ntchito kuyika zida zodulira. Matekinoloje onse awiriwa ndi matekinoloje opaka ma ion a arc, okhala ndi chitsulo chachitsulo mpaka 20% ~ 40%.

1. Kupaka kwa cathode arc ion

Kutuluka kwa cathodic arc ion cating kwadzetsa chitukuko cha ukadaulo woyika zokutira zolimba pa nkhungu. The ionization mlingo wa cathodic arc ❖ kuyanika ❖ kuyanika ndi 60% ~ 90%, kulola ambiri ayoni zitsulo ndi ma ion gasi anachita kufika pamwamba pa workpiece ndi kusungabe ntchito mkulu, chifukwa mafunsidwe anachita ndi mapangidwe zokutira zolimba monga tiN. Pakalipano, teknoloji yokutira ya cathodic arc ion imagwiritsidwa ntchito makamaka kuyika zokutira zolimba pa nkhungu.

Gwero la cathode arc ndi gwero lokhazikika la evaporation lopanda dziwe losungunuka lokhazikika, ndipo malo a arc gwero amatha kuyikidwa mosasamala, kuwongolera kuchuluka kwa kagwiritsidwe ntchito ka chipinda chophikira ndikuwonjezera mphamvu yodzaza ng'anjo. Mawonekedwe a magwero a cathode arc amaphatikizapo magwero ang'onoang'ono ozungulira a cathode arc, magwero a arc columnar, ndi magwero amakona akulu akulu akulu. Zigawo zosiyanasiyana za magwero ang'onoang'ono a arc, magwero a arc columnar, ndi ma arc akuluakulu amatha kukonzedwa padera kuti asungire mafilimu amitundu yambiri ndi mafilimu a nano multilayer. Pakadali pano, chifukwa cha kuchuluka kwachitsulo chachitsulo cha cathodic arc ion ❖ kuyanika, ma ion achitsulo amatha kuyamwa mpweya wochulukirapo, zomwe zimapangitsa kuti pakhale njira zambiri komanso ntchito yosavuta kuti mupeze zokutira zabwino kwambiri. Komabe, pali madontho owoneka bwino m'mapangidwe ang'onoang'ono a zokutira zomwe zimapezedwa ndi zokutira za cathodic arc ion. M'zaka zaposachedwa, matekinoloje ambiri atsopano atulukira kuti akonzenso mawonekedwe a filimuyo, yomwe yasintha khalidwe la filimu yophimba arc ion.