Ntụkwasị mmiri mmiri ọgwụ Plasma abawanyela Isi nke 1

Ntụkwasị mmiri kemịkalụ (CVD). Dị ka aha ahụ pụtara, ọ bụ usoro na-eji gas precursor reactants mepụta fim siri ike site na mmeghachi omume kemịkalụ na intermolecular. N'adịghị ka PVD, a na-emekarị usoro CVD na nrụgide dị elu (obere oghere), ebe a na-eji nrụgide dị elu mee ihe iji mee ka ọnụ ọgụgụ ntinye nke ihe nkiri ahụ dịkwuo elu. Enwere ike ịkewa ntinye ihe mkpuchi kemịkalụ n'ime CVD izugbe (nke a makwaara dị ka CVD thermal) yana plasma-enhanced chemical vapor deposition (Plasma-Enhanced Chemical Vapor Deposition. PECVD) dabere na plasma ọ na-etinye aka na usoro ntinye ego. Akụkụ a lekwasịrị anya na teknụzụ PECVD gụnyere usoro PECVD yana akụrụngwa PECVD a na-ejikarị yana ụkpụrụ ọrụ.

Nkwụnye kemịkalụ kemịkalụ na-akwalite Plasma bụ usoro ntinye kemịkalụ kemịkalụ dị gịrịgịrị nke na-eji plasma na-agbapụta ọkụ na-etinye mmetụta na usoro ntinye ebe a na-eme usoro ntinye mmiri kemịkalụ dị ala. N'echiche a, teknụzụ CVD a na-emekarị na-adabere na ọnọdụ okpomọkụ dị elu iji ghọta mmeghachi omume kemịkalụ n'etiti ihe ndị na-emepụta gas na ntinye nke ihe nkiri dị gịrịgịrị, yabụ enwere ike ịkpọ teknụzụ CVD thermal.

Na ngwaọrụ PECVD, nrụgide gas na-arụ ọrụ bụ banyere 5 ~ 500 Pa, na njupụta nke electrons na ion nwere ike iru 109 ~ 1012 / cm3, ebe nkezi ike nke electrons nwere ike iru 1 ~ 10 eV. Ihe dị iche na usoro PECVD na ụzọ CVD ndị ọzọ bụ na plasma nwere ọnụ ọgụgụ dị ukwuu nke electrons ike dị elu, nke nwere ike inye ume ike dị mkpa maka usoro ntinye mmiri nke mmiri mmiri. The nkukota nke electrons na gas-phase ụmụ irighiri ihe nwere ike na-akwalite decomposition, chemosynthesis, excitation na ionization Filiks nke gas ụmụ irighiri, na-amụba ukwuu reactive chemical dị iche iche, si otú budata mbenata okpomọkụ nso nke CVD mkpa film deposition, na-eme ka o kwe omume ịghọta na CVD usoro, nke a na mbụ chọrọ ka a rụrụ na elu okpomọkụ, na ala okpomọkụ. Uru nke obere ihe nkiri ihe nkiri dị ala dị ala bụ na ọ nwere ike izere mgbasa ozi na-enweghị isi na mmeghachi omume kemịkalụ n'etiti ihe nkiri ahụ na mkpụrụ, mgbanwe nhazi na mmebi nke ihe nkiri ahụ ma ọ bụ ihe ntanetị, na nnukwu nrụgide okpomọkụ na fim na mkpụrụ.

–E wepụtara akụkọ aonye na-emepụta igwe mkpuchi ikukuGuangdong Zhenhua