Mmetụta nke ion bombardment na ihe nkiri oyi akwa / substrate interface

Mgbe ntinye nke atọm akpụkpọ ahụ malitere, bombu ion nwere mmetụta ndị a na nhụta akpụkpọ ahụ/ substrate.

(1) Ngwakọta anụ ahụ. N'ihi na nke elu-ike injection ion, sputtering nke na-edebe atọm na recoil injection nke elu atọm na cascade collision phenomenon, ga-eme ka nso-elu ebe nke akpụkpọ ahụ / isi interface nke mkpụrụ ọcha na akpụkpọ ọcha nke na-abụghị diffusion Ịgwakọta, a agwakọta mmetụta ga-abụ conducive ka e guzobe nke akpụkpọ ahụ / isi iyi oyi oyi akwa "ntụgharị n'etiti akpụkpọ ahụ, ntughari oyi akwa n'etiti akpụkpọ ahụ / isi nchikota nke oyi akwa. Membrane/base interface, ruo micron ole na ole gbara ọkpụrụkpụ. Obere micrometer ole na ole, nke usoro ọhụrụ nwere ike ịpụta. Nke a dị ezigbo mma iji melite ike adhesion nke akpụkpọ ahụ / isi interface.

(2) Mgbasa mgbasawanye. Ntụpọ ntụpọ dị elu na mpaghara dị nso na elu okpomọkụ na-abawanye ọnụego mgbasa ozi. Ebe ọ bụ na elu bụ ntụpọ ntụpọ, obere ions na-enwe mmasị na-atụgharị elu, na bombu ion nwere mmetụta nke na-eme ka nhụsianya elu elu dịkwuo elu ma na-eme ka mgbasa ozi dị n'otu nke echekwabara na nke mkpụrụ akụ.

(3) Ụdị nucleation emelitere. A na-ekpebi njirimara nke atọm condensed n'elu ala site na mmekọrịta elu ya na ihe ndị na-ebuga ya n'elu. Ọ bụrụ na enweghị mmekọrịta siri ike n'etiti atom condensed na elu nke mkpụrụ, atom ahụ ga-agbasa n'elu ruo mgbe ọ na-agbanye n'ọnọdụ ike dị elu ma ọ bụ na-ejikọta ya na atom ndị ọzọ na-agbasasa. Ụdị nucleation a ka a na-akpọ nucleation na-adịghị emeghachi omume. Ọbụlagodi na nke mbụ bụ ihe gbasara ọnọdụ nucleation na-adịghị arụ ọrụ, site na ion bombardment nke substrate elu nwere ike mepụta ọtụtụ ntụpọ, na-amụba nucleation njupụta, nke na-eme ka e guzobe mgbasa - reactive nucleation mode.

(4) Mwepụ nke ọma nke atọm ndị ejikọtaghị ọnụ. A na-ekpebi ịgbasa atom nke dị n'elu site na steeti njikọta mpaghara, na bọmbụ ion nke dị n'elu nwere ike ịpụpụ atom ndị nwere njikọ chiri anya. Mmetụta a na-apụtawanye ìhè na nhazi nke mgbasa ozi-reactive interfaces.

(5) Mmelite nke mkpuchi elu na nkwalite nke nkwụsị nke plating. N'ihi nrụgide gas na-arụ ọrụ dị elu nke ion plating, atom ndị na-ekpochapụ ma ọ bụ sputtered na-adaba na nkukota na gas atom iji kwalite mgbasa, na-ebute ihe mkpuchi mkpuchi dị mma.

–E wepụtara akụkọ aonye na-emepụta igwe mkpuchi ikukuGuangdong Zhenhua