Usoro ndị a na-emekarị maka ịdebe mkpuchi siri ike

1. Thermal CVD teknụzụ

Ihe mkpuchi siri ike na-abụkarị mkpuchi seramiiki metal (TiN, wdg), bụ nke a na-emepụta site na mmeghachi omume nke metal na mkpuchi na reactive gasification. Na mbụ, a na-eji teknụzụ CVD thermal iji nye ike ịgbalite mmeghachi omume nchikota site na ike ọkụ na okpomọkụ dị elu nke 1000 ℃. Okpomọkụ a dị mma naanị maka itinye TiN na mkpuchi siri ike na ngwaọrụ carbide ciment. Ka ọ dị ugbu a, ọ ka bụ teknụzụ dị mkpa maka itinye TiN - Al2O3 mkpuchi ihe mejupụtara na isi ngwaọrụ carbide ciment.

1. Oghere oghere cathode ion mkpuchi na mkpuchi waya arc ion ọkụ

N'ime 1980s, oghere cathode ion mkpuchi na mkpuchi waya arc ion na-ekpo ọkụ ka a na-eji tinye ihe eji egbutu ihe. Abụọ nke teknụzụ mkpuchi ion ndị a bụ teknụzụ mkpuchi mkpuchi ion arc, yana ọnụego ionization ọla ruru 20% ~ 40%.

1. Cathode arc ion mkpuchi

Mpụta nke cathodic arc ion cating emewo ka mmepe nke nkà na ụzụ nke ịdebe ihe mkpuchi siri ike na ihe ọkpụkpụ. The ionization ọnụego nke cathodic arc ion mkpuchi bụ 60% ~ 90%, ikwe ka a ọnụ ọgụgụ buru ibu nke metal ion na mmeghachi omume gas ion iru elu nke workpiece ma ka na-ejigide ọrụ dị elu, na-akpata mmeghachi omume ntinye na guzobe nke siri ike mkpuchi dị ka TiN. Ka ọ dị ugbu a, a na-ejikarị teknụzụ mkpuchi cathodic arc ion iji tinye mkpuchi siri ike na ebu.

Isi iyi nke cathode arc bụ isi iyi ikuku nke steeti siri ike na-enweghị ọdọ mmiri a wụrụ awụ, na enwere ike idobe ọnọdụ isi iyi ahụ n'ụzọ akaghị aka, na-eme ka ọnụọgụ oghere nke ụlọ mkpuchi na-abawanye ma na-abawanye ikike ibu ọkụ. Ụdị isi mmalite nke cathode arc gụnyere obere isi mmalite cathode okirikiri, isi mmalite arc kọlụm, na isi mmalite nnukwu arc akụkụ akụkụ anọ. Enwere ike ịhazi akụkụ dị iche iche nke obere isi mmalite arc, columnar arc na isi mmalite dị iche iche iji tinye ihe nkiri multilayer na ihe nkiri nano multilayer. Ka ọ dị ugbu a, n'ihi ọnụ ọgụgụ ionization metal dị elu nke mkpuchi cathodic arc ion, ion metal nwere ike ịmịnye gas mmeghachi omume ọzọ, na-eme ka usoro nhazi dị ukwuu na ọrụ dị mfe iji nweta mkpuchi siri ike dị mma. Otú ọ dị, e nwere obere ụmụ irighiri mmiri dị na micro-structure nke mkpuchi mkpuchi nke a na-enweta site na mkpuchi cathodic arc ion. N'ime afọ ndị na-adịbeghị anya, ọtụtụ teknụzụ ọhụrụ apụtawo iji mee ka nhazi nke ihe nkiri ahụ dị mma, nke mere ka mma nke ihe nkiri mkpuchi arc ion dị mma.