Thaum lub deposition ntawm membrane atoms pib, ion bombardment muaj cov nram qab no cov teebmeem ntawm daim nyias nyias / substrate interface.
(1) Lub cev sib xyaw. Vim hais tias ntawm high-zog ion txhaj, sputtering ntawm deposited atoms thiab cov recoil txhaj ntawm nto atoms thiab cascade kev sib tsoo tshwm sim, yuav ua rau lub ze-nto qhov chaw ntawm daim nyias nyias / hauv paus interface ntawm lub substrate ntsiab thiab daim nyias nyias cov ntsiab lus ntawm cov tsis-diffusion mixing, qhov sib tov nyhuv no yuav pab tau rau cov txheej txheem ntawm cov txheej txheem, thiab cov txheej txheem sib xyaw ua ke yuav ua rau muaj kev sib xyaw ua ke ntawm cov txheej txheem membrane, thiab cov txheej txheem sib xyaw ua ke. membrane / puag interface, mus txog ob peb microns tuab. Ob peb micrometers tuab, uas cov theem tshiab tuaj yeem tshwm sim. Qhov no yog qhov zoo heev los txhim kho lub zog adhesion ntawm daim nyias nyias / hauv paus interface.
(2) Txhim kho diffusion. Lub siab tsis xws luag concentration nyob rau hauv cheeb tsam ze-nto thiab qhov kub thiab txias nce tus nqi diffusion. Txij li qhov saum npoo yog qhov tsis xws luag, cov ions me me muaj qhov ua rau lub ntsej muag tsis zoo, thiab ion foob pob ua rau muaj txiaj ntsig ntawm kev ntxiv dag zog rau qhov deflection thiab txhim kho qhov sib txawv ntawm qhov sib txawv ntawm cov khoom tso thiab substrate atoms.
(3) Txhim kho nucleation hom. Cov khoom ntawm lub atom condensed nyob rau hauv lub substrate nto yog txiav txim los ntawm nws nto kev sib tshuam thiab nws cov migration zog ntawm qhov chaw. Yog tias tsis muaj kev cuam tshuam zoo ntawm cov atom condensed thiab qhov chaw ntawm lub substrate, lub atom yuav diffuse rau ntawm qhov chaw kom txog rau thaum nws nucleates ntawm ib tug high-zog txoj hauj lwm los yog sib tsoo nrog lwm yam diffusing atoms. Hom nucleation no hu ua non-reactive nucleation. Txawm hais tias tus thawj belongs rau cov ntaub ntawv ntawm non-reactive nucleation hom, los ntawm ion bombardment ntawm lub substrate nto tuaj yeem tsim ntau yam tsis xws luag, ua rau cov nucleation ceev, uas yog ntau conducive rau tsim ntawm diffusion - reactive nucleation hom.
(4) Kev tshem tawm zoo tshaj plaws ntawm cov atoms xoob xoob. Lub sputtering ntawm cov atoms saum npoo yog txiav txim los ntawm lub xeev kev sib raug zoo hauv zos, thiab ion foob pob ntawm qhov chaw muaj feem ntau yuav sputter tawm loosely bonded atoms. Cov nyhuv no tau tshaj tawm hauv kev tsim cov diffusion-reactive interfaces.
(5) Kev txhim kho ntawm qhov chaw npog thiab txhim kho plating bypass. Vim lub siab ua haujlwm siab ntawm ion plating, evaporated lossis sputtered atoms raug kev sib tsoo nrog cov roj atoms txhawm rau txhim kho kev tawg, ua rau cov txheej txheem zoo wrap-nyob ib puag ncig.
– Zaj lus no yog tso tawm los ntawmtshuab nqus tsev txheej tshuab manufacturersGuangdong Zhenhua
Post lub sij hawm: Dec-09-2023