The girma dokar na injin evaporation shafi fim Layer

A lokacin shafewar evaporation, ƙaddamarwa da haɓakar fim ɗin fim ɗin shine tushen fasahar suturar ion daban-daban

1.Nuclear

Ininjin shafe fasahar,Bayan fim Layer barbashi suna evaporated daga evaporation tushen a cikin nau'i na atoms, suka tashi kai tsaye zuwa workpiece a high injin da samar da fim Layer ta nucleation da girma a saman da workpiece. A lokacin da ba za a iya cirewa ba, ƙarfin atom ɗin Layer na fim da ke tserewa daga tushen evaporation yana kusan 0.2eV. Lokacin da haɗin kai tsakanin barbashi na fim ɗin fim ɗin ya fi ƙarfin haɗin kai tsakanin atom ɗin Layer ɗin fim da aikin aikin, suna samar da tsibiri tsakiya. Atom Layer na fim guda ɗaya yana tsayawa a saman kayan aikin na tsawon lokacin yin motsi mara daidaituwa, watsawa, ƙaura, ko karo tare da wasu ƙwayoyin zarra don samar da gungu na atomic Yawan atom ɗin a cikin gungu na atomic ya kai wani ƙimar mahimmanci, an samar da tsayayyen tsakiya, wanda ake kira tsakiya mai kama da juna.

santsi, kuma ya ƙunshi lahani da matakai da yawa, wanda ke haifar da bambanci a cikin ƙarfin adsorption na sassa daban-daban na workpiece zuwa atom ɗin rediyoaktif. Ƙarfin adsorption na surface na lahani ya fi girma fiye da na al'ada, don haka ya zama cibiyar aiki, wanda ya dace da ƙaddamar da fifiko, wanda ake kira nucleation heterogeneous. Lokacin da haɗin kai ya zama daidai da ƙarfin ɗauri, ko ƙarfin dauri tsakanin ƙwayoyin membrane da aikin aiki ya fi ƙarfin haɗin kai tsakanin ƙwayoyin membrane, tsarin lamellar yana samuwa. A cikin fasahar ion plating, an kafa tushen tsibirin a mafi yawan lokuta.

2. Girma

Da zarar an kafa ainihin fim ɗin, yana ci gaba da girma ta hanyar kama abubuwan da suka faru atom. Tsibirin suna girma kuma suna haɗuwa da juna don samar da mafi girma hemispheres, a hankali suna samar da wani yanki na tsibirin hemispherical wanda ya yada saman saman aikin.

Lokacin da atomic makamashi na fim Layer ne high, shi zai iya yaduwa isasshe a kan surface da kuma m m ci gaba da fim za a iya kafa a lokacin da m shigowa atomic gungu ne small.If da yadawa na atoms a kan surface ne rauni da girman da ajiya gungu ne babba, sun wanzu a matsayin babban peninsular nuclei.The saman tsibirin tsibirin da karfi shadow core sakamako a kan m shadow core yana da tasiri a kan babban tsibirin. Hasashen.” Hasashen saman ya fi dacewa don ɗaukar atom ɗin da aka ajiye na gaba da haɓakar fifiko, wanda ke haifar da ƙara ƙimar ƙima akan saman don samar da lu'ulu'u na conical ko columnar masu girman isa. Ana samun ɓoyayyen ɓoyayyiyar shiga tsakanin lu'ulu'u na conical kuma ƙimar ƙimar ƙasa tana ƙaruwa. Za'a iya samun nama mai kyau a babban injin, tare da raguwar injin injin, microstructure na membrane ya zama mai kauri da kauri.