Zubar da Turin Sinadari na Ingantaccen Plasma Babi na 1

Abubuwan Turin Sinadarai (CVD). Kamar yadda sunan ke nunawa, wata dabara ce da ke amfani da reactants precursor reactants don samar da ingantattun fina-finai ta hanyar halayen sinadarai na atomic da intermolecular. Ba kamar PVD ba, ana aiwatar da tsarin CVD mafi yawa a cikin yanayi mafi girma (ƙananan vacuum), tare da matsa lamba mafi girma da ake amfani da shi da farko don ƙara yawan adadin fim din. Za'a iya rarraba jigilar sinadarai zuwa cikin CVD na gaba ɗaya (wanda kuma aka sani da thermal CVD) da haɓakar tururin sinadarai mai haɓaka jini (Plasma-Enhanced Chemical Vapor Deposition. PECVD) gwargwadon ko plasma yana cikin tsarin jibgewa. Wannan sashe yana mai da hankali kan fasahar PECVD gami da tsarin PECVD da kayan aikin PECVD da aka saba amfani da su da ƙa'idar aiki.

Turin tururin sinadarai na haɓakar Plasma dabara ce ta sirara-fim ɗin sinadari mai ɓoyewa wanda ke amfani da plasma fitarwa mai haske don yin tasiri akan tsarin ƙaddamarwa yayin da ƙaramin matsi na tururi na sinadari ke gudana. A wannan ma'anar, fasahar CVD ta al'ada ta dogara da yanayin zafi mafi girma don gane halayen sinadarai tsakanin abubuwan lokaci na iskar gas da jigon fina-finai na bakin ciki, don haka ana iya kiran fasahar CPD ta thermal.

A cikin na'urar PECVD, matsa lamba gas mai aiki yana da kusan 5 ~ 500 Pa, kuma yawancin electrons da ions na iya kaiwa 109 ~ 1012 / cm3, yayin da matsakaicin makamashi na electrons zai iya kaiwa 1 ~ 10 eV. Abin da ya bambanta hanyar PECVD da sauran hanyoyin CVD shine cewa plasma ya ƙunshi babban adadin kuzarin lantarki, wanda zai iya samar da makamashin kunnawa da ake buƙata don tsarin ƙaddamar da tururi. A karo na electrons da gas-lokaci kwayoyin iya inganta bazuwar, chemosynthesis, excitation da ionization tafiyar matakai na gas kwayoyin, samar da sosai reactive sinadaran kungiyoyin, don haka muhimmanci rage yawan zafin jiki kewayon CVD bakin ciki film jijjiga, sa shi yiwuwa a gane da CVD tsari, wanda aka asali da ake bukata da za a za'ayi a high yanayin zafi, a low yanayin zafi. Amfanin ƙananan zafin jiki na bakin ciki na fim shine cewa zai iya guje wa yaduwar da ba dole ba da kuma maganin sinadaran tsakanin fim din da substrate, canje-canjen tsarin da lalacewar fim din ko kayan da ake amfani da su, da kuma manyan matsalolin thermal a cikin fim da substrate.

–An fitar da wannan labarininjin shafa injin injinGuangdong Zhenhua