Lokacin da jigon kwayoyin halitta na membrane ya fara, ion bombardment yana da sakamako masu zuwa akan mahallin membrane/ substrate.
(1) Hadawa ta jiki. Saboda high-makamashi ion allura, sputtering na ajiya atoms da recoil allura na surface atoms da cascade karo sabon abu, zai haifar da kusa-surface yankin na membrane / tushe dubawa na substrate abubuwa da membrane abubuwa na wadanda ba yaduwa hadawa, wannan hadawa sakamako zai zama conducive zuwa ga samuwar da membrane / tushe Layer "misali, da ke dubawa tsakanin Layer Layer. membrane/base interface, har zuwa ƴan microns lokacin farin ciki. Kauri ƴan micrometers, waɗanda a cikinsu na iya bayyana sabbin matakai. Wannan yana da kyau sosai don haɓaka ƙarfin mannewa na membrane / tushe dubawa.
(2) Ingantaccen yaduwa. Babban maƙasudin lahani a cikin yankin da ke kusa da saman ƙasa da kuma yawan zafin jiki yana ƙara yawan watsawa. Tunda saman yana da lahani, ƙananan ions suna da hali don karkatar da saman, kuma ion bombardment yana da tasirin ƙara haɓaka juzu'i da haɓaka yaduwar juna na atom da aka ajiye da su.
(3) Ingantacciyar yanayin nucleation. Abubuwan da ke tattare da atom ɗin da aka tattara akan farfajiyar ƙasa an ƙaddara su ta hanyar hulɗar samansa da halayen ƙaura a saman. Idan babu wata mu'amala mai ƙarfi tsakanin zarra da ke daɗaɗɗen zarra da saman ƙasan, zarra ɗin zai yaɗu a saman har sai ya ɓarke a matsayi mai ƙarfi ko kuma ya yi karo da wasu ƙwayoyin zarra masu yaduwa. Ana kiran wannan yanayin nucleation wanda ba shi da amsawa. Ko da ainihin nasa ne na yanayin yanayin nucleation mara aiki, ta hanyar ion bombardment na substrate surface na iya haifar da ƙarin lahani, ƙara yawan ƙwayar nucleation, wanda ya fi dacewa da samuwar watsawa - yanayin nucleation mai amsawa.
(4) Fi dacewa cire atom ɗin da aka ɗaure. Jiha haɗin kai na gida ne ke ƙayyade sputtering na atom ɗin ƙasa, kuma ion bombardment na saman yana yiwuwa ya fitar da atom ɗin da aka ɗaure. Wannan tasirin ya fi fitowa fili a cikin samuwar musaya-mai amsawa.
(5) Inganta ɗaukar hoto da haɓakawa ta hanyar wucewar plating. Saboda tsananin aiki na iskar gas na ion plating, atom ɗin da aka ƙafe ko sputtered suna fuskantar karo tare da atom ɗin gas don haɓaka tarwatsawa, yana haifar da kyawawan kaddarorin kunsa.
–An fitar da wannan labarininjin shafa injin injinGuangdong Zhenhua
Lokacin aikawa: Dec-09-2023