Ukufakwa kwe-ion kusho ukuthi ama-reactants noma izinto ezihwamukile zifakwa ku-substrate ngokufakwa kwe-ion kwama-ion egesi noma izinto ezihwamukile ngenkathi izinto ezihwamukile zihlukaniswa noma zikhishwa igesi ekamelweni le-vacuum. Isimiso sobuchwepheshe semishini yokufakwa kwe-cathode eqinile engenalutho yi-hollow cathode ion coating, okuwubuchwepheshe bokufakwa kwe-hollow cathode discharge deposition.
Mayelana nesimiso sokufakwa kokukhishwa kwe-cathode engenalutho: Indlela yokufakwa kokukhishwa kwe-cathode engenalutho isebenzisa ukukhishwa kwe-cathode eshisayo ukukhiqiza umsebe we-plasma, futhi i-cathode iyipayipi le-tantalum elingenalutho. I-cathode kanye ne-anode eyisizayo ziseduze, okuyizinsika ezimbili ezivuthela ukukhishwa kwe-arc.
Isibhamu sokukhipha i-cathode esingenalutho sivutha ngezindlela ezimbili.
1, Ukusetshenziswa kwensimu kagesi evame kakhulu esetshenziswa ku-cathode tantalum tube, ukuze i-cathode tantalum tube i-argon gas ionization ibe yi-argon ion bese ibangelwa yi-cathode tantalum tube eqhutshwa njalo yi-argon ion, kuze kube yilapho ukushisa kufudumala kuze kufike ezingeni lokushisa eliphansi lokukhishwa kwama-electron futhi kukhiqize i-plasma electron beam.
2, Ku-anode yokusiza kanye ne-cathode tantalum tube phakathi kokusetshenziswa kwe-voltage engaba ngu-300V DC, i-cathode tantalum tube isadlulela kugesi we-argon, ku-1Pa-10Pa argon gas pressure, i-anode yokusiza kanye ne-cathode tantalum tube glow discharge, ukukhiqizwa kwe-argon ion bombardment kuhlala kuhlasela i-cathode tantalum tube, kuze kube yilapho izinga lokushisa lingu-2300K-2400K, i-cathode tantalum tube ikhipha inani elikhulu lama-electron, izoshintshwa kusukela "ekukhishweni kokukhanya" iye "ekukhishweni kwe-arc", kulokhu i-voltage iphansi njengo-30V-60V, bese kuthi uma nje i-cathode kanye ne-anode phakathi kokunikezwa kwamandla, ungakhiqiza i-plasma electron beam.
Imishini yokumboza nge-Cathodic
1、Thuthukisa isakhiwo sesibhamu sokuqala, kusukela kumandla aphezulu okuqala angu-230A kuya ku-280A.
2、Thuthukisa isakhiwo sokuqala sohlelo lokupholisa, kusukela ekupholiseni komshini wamanzi eqhwa ongu-4℃ wokuqala kuya ekupholiseni kwamanzi okupholisa okushisa kwegumbi, okusindisa izindleko zikagesi kubasebenzisi.
3, Thuthukisa isakhiwo sokuqala sokudlulisa ngomshini, esishintshelwe kwisakhiwo sokudlulisa uketshezi olunobuthi, izinga lokushisa eliphezulu ngeke livimbe uhlaka olujikelezayo.
4, indawo yokumboza esebenza kahle engu-650X1100, ingamukela abakhiqizi be-dies and gear abakhulu abangu-750 X 1250X600 be-broach ende kakhulu, enomthamo omkhulu kakhulu.
Umshini wokumboza i-ion ye-cathode engenalutho usetshenziswa kakhulu ekufakeni amathuluzi, isikhunta, isikhunta esikhulu sesibuko, isikhunta sepulasitiki, imimese yokuphehla kanye neminye imikhiqizo.
Isikhathi sokuthunyelwe: Novemba-07-2022