Kodi mfundo yaukadaulo ya zida zolimba zokutira za cathode zopanda kanthu ndi iti?

Kuphimba ma ion kumatanthauza kuti ma reactants kapena zinthu zomwe zasanduka nthunzi zimayikidwa pa substrate ndi kuphulika kwa ma ion a gasi kapena zinthu zomwe zasanduka nthunzi pamene zinthu zomwe zasanduka nthunzi zimalekanitsidwa kapena mpweya umatulutsidwa mu chipinda chopanda mpweya. Mfundo yaukadaulo ya zida zolimba zophimba ma ion za hollow cathode ndi hollow cathode ion coating, yomwe ndi ukadaulo woyika ma ion a hollow cathode discharge deposition.

Ponena za mfundo ya hollow cathode discharge deposition: Njira yochotsera hollow cathode discharge deposition imagwiritsa ntchito hot cathode discharge kuti ipange plasma beam, ndipo cathode ndi hollow tantalum chubu. Cathode ndi anode yothandizira zili pafupi, zomwe ndi mitengo iwiri yomwe imayatsa arc discharge.

Mfuti ya hollow cathode discharge deposition imayaka m'njira ziwiri.
1, Kugwiritsa ntchito mphamvu zamagetsi zamagetsi zomwe zimagwiritsidwa ntchito pa chubu cha cathode tantalum, kuti chubu cha cathode tantalum chilowetse mpweya wa argon mu ma ayoni a argon kenako ndikuyambitsidwa ndi chubu cha cathode tantalum chomwe chimayendetsedwa mosalekeza ndi ma ayoni a argon, mpaka kutentha kutenthe mpaka muyezo wocheperako wa kutentha kwa ma elekitironi ndikupanga kuwala kwa elekitironi ya plasma.

2, Mu chubu chothandizira cha anode ndi cathode tantalum pakati pa kugwiritsa ntchito voteji ya pafupifupi 300V DC, chubu cha cathode tantalum chimapitabe mu mpweya wa argon, mu mpweya wa argon wa 1Pa-10Pa, chozizwitsa cha anode chothandizira ndi chubu cha cathode tantalum glow discharge, kupanga kwa argon ion bombardment kumaphulitsa chubu cha cathode tantalum nthawi zonse, mpaka kutentha kwa 2300K-2400K, chubu cha cathode tantalum chimatulutsa ma elekitironi ambiri, chidzasinthidwa kuchoka pa "glow discharge" kupita ku "arc discharge", nthawi ino voteji ndi yotsika ngati 30V-60V, ndiye bola ngati cathode ndi anode pakati pa magetsi, mutha kupanga kuwala kwa elekitironi ya plasma.

Zipangizo zokutira za Cathodic
1、Konzani kapangidwe ka mfuti koyambirira, kuyambira pa mphamvu yayikulu yoyambirira ya 230A mpaka 280A.
2、Konzani kapangidwe koyambirira ka makina oziziritsira, kuyambira makina oziziritsira madzi a ayezi a 4℃ oyambirira mpaka kuziziritsa madzi ozizira kutentha kwa chipinda, zomwe zimapulumutsa ndalama zamagetsi kwa ogwiritsa ntchito.
3, Konzani kapangidwe koyambirira ka makina otumizira, kasinthidwe kukhala kapangidwe ka maginito otumizira madzi, kutentha kwambiri sikudzatsekereza chimango chozungulira.
4, malo ophikira ogwira ntchito ￠ 650X1100, amatha kukhala ndi opanga zida zazikulu za 750 X 1250X600 zopangidwa ndi broach yayitali kwambiri, yokhala ndi voliyumu yayikulu kwambiri.

Makina ophikira a cathode ion osapanga kanthu amagwiritsidwa ntchito makamaka popangira zida, nkhungu, nkhungu zazikulu zamagalasi, nkhungu zapulasitiki, mipeni yophikira ndi zinthu zina.