Ion txheej txhais tau hais tias cov reactants los yog evaporated cov ntaub ntawv tso rau ntawm lub substrate los ntawm lub ion bombardment ntawm cov roj ions los yog evaporated cov ntaub ntawv thaum cov ntaub ntawv evaporated yog dissociated los yog roj tawm hauv lub tshuab nqus tsev chamber.Lub hauv paus ntsiab lus ntawm hollow cathode hard txheej khoom yog hollow cathode ion txheej, uas yog ib tug hollow cathode paug deposition technology.
Hais txog lub hauv paus ntsiab lus ntawm hollow cathode paug deposition: Cov txheej txheem hollow cathode tawm deposition siv ib tug kub cathode paug los tsim ib tug plasma beam, thiab lub cathode yog ib tug hollow tantalum raj.Lub cathode thiab cov auxiliary anode yog nyob ze rau ib leeg, uas yog ob tug ncej uas ignite lub arc paug.
Lub hollow cathode tso tawm phom ignites nyob rau hauv ob txoj kev.
1, Kev siv hluav taws xob ntau zaus siv rau cathode tantalum raj, kom lub cathode tantalum raj argon gas ionization rau hauv argon ions thiab tom qab ntawd tshwm sim los ntawm cathode tantalum raj tsis tu ncua bombarded los ntawm argon ions, kom txog thaum lub tshav kub kom sov li. Yam tsawg kawg nkaus kub tus qauv ntawm electron emission thiab tsim plasma electron beam.
2, nyob rau hauv lub auxiliary anode thiab cathode tantalum raj ntawm daim ntawv thov ntawm txog 300V DC voltage, lub cathode tantalum raj tseem dhau mus rau hauv cov roj argon, nyob rau hauv lub 1Pa-10Pa argon gas siab, lub auxiliary anode thiab cathode tantalum raj glow paug tshwm sim, Lub cim ntawm argon ion bombardment tas li bombard lub cathode tantalum raj, kom txog rau thaum 2300K-2400K kub, lub cathode tantalum raj emit ib tug loj tus naj npawb ntawm electrons, yuav hloov los ntawm "glow paug" mus rau "arc paug", lub sij hawm no lub voltage yog raws li. qis li 30V-60V, ces ntev li ntev raws li lub cathode thiab anode ntawm lub hwj chim mov, koj muaj peev xwm tsim plasma electron beam.
Cathodic txheej khoom
1, Txhim kho tus qauv phom qub, los ntawm qhov siab tshaj plaws tam sim no ntawm 230A txog 280A.
2 、 Txhim kho cov txheej txheem txias txias, los ntawm thawj 4 ℃ dej khov tshuab ua kom txias rau chav txias dej txias, txuag cov nqi hluav taws xob rau cov neeg siv.
3, Txhim kho cov qauv kev sib txuas ntawm cov khoom qub, hloov mus rau cov dej sib nqus sib nqus, qhov kub thiab txias yuav tsis cuam tshuam cov rotating ncej.
4, qhov zoo txheej txheej ￠ 650X1100, tuaj yeem ua tau raws li 750 X 1250X600 qhov hnyav tuag thiab iav manufacturers ntawm qhov ntev ntev broach, nrog lub ntim loj heev.
Lub hollow cathode ion txheej tshuab yog tsuas yog siv rau hauv plating ntawm cov cuab yeej, pwm, daim iav loj pwm, yas pwm, hobbing riam thiab lwm yam khoom.
Post lub sij hawm: Nov-07-2022