Ukugcotshwa kwe-ion kusho ukuthi izinto ezisabelayo noma izinto ezihwamukile zifakwa ku-substrate ngokuqhunyiswa kwe-ion yama-ion egesi noma izinto ezihwamuzayo ngenkathi izinto ezihwamukile zihlukaniswa noma zikhishwa igesi kugumyu. Isimiso sobuchwepheshe sezinto zokumboza eziqinile ze-cathode ziyi-cathode ion engenalutho, okuwubuchwepheshe bokufakwa kwe-cathode yokukhipha i-cathode engenalutho.
Mayelana nomgomo wokukhishwa kwe-cathode engenalutho: Indlela yokukhipha i-cathode engenalutho isebenzisa ukukhishwa kwe-cathode eshisayo ukuze kukhiqizwe i-plasma beam, futhi i-cathode iyishubhu le-tantalum elingenalutho. I-cathode kanye ne-anode eyisizayo isondelene, okuyizigxobo ezimbili ezivutha ukukhishwa kwe-arc.
Isibhamu sokukhipha i-cathode esingenalutho sivutha ngezindlela ezimbili.
1, Ukusetshenziswa kwenkundla kagesi imvamisa ephezulu esetshenziswa ku-cathode tantalum tube, ukuze i-cathode tantalum tube argon ionization yegesi ibe yi-argon ions bese ibangelwa ishubhu le-cathode tantalum eliqhunyiswa ngokuqhubekayo ngama-argon ions, kuze kube yilapho ukushisa ukufudumala kuze kufike ezingeni lokushisa elincane lokuphuma kwe-electron futhi kukhiqize i-plasma ye-plasma.
I-2, ku-anode esiza ne-cathode tantalum tube phakathi kokusetshenziswa kwe-voltage ye-300V DC, ithubhu ye-cathode tantalum isadlula ku-argon gas, ku-1Pa-10Pa i-argon gas pressure, i-anode eyisizayo kanye ne-cathode tantalum tube glow discharge phenomenon, isizukulwane se-tuber cathodergon njalo Izinga lokushisa elingu-2300K-2400K, ithubhu ye-cathode tantalum ikhipha inani elikhulu lama-electron, izoshintshwa isuke “ekuphumeni okukhanyayo” iye “kukukhipha i-arc”, kulokhu i-voltage iphansi njenge-30V-60V, bese kuthi inqobo nje uma i-cathode ne-anode phakathi kokunikezwa kwamandla, ungakhiqiza i-electron beam ye-plasma.
Imishini yokugqoka ye-Cathodic
1, Thuthukisa ukwakheka kwesibhamu kwasekuqaleni, ukusuka kwenani eliphezulu lamanje elingu-230A ukuya ku-280A.
2, Thuthukisa ukwakheka kwesistimu yokupholisa yasekuqaleni, kusukela emshinini wokuqala wokupholisa amanzi eqhwa ongu-4℃ kuya kumazinga okushisa ekamelo okupholisa amanzi okupholisa, konga izindleko zikagesi kubasebenzisi.
3, Thuthukisa ukwakheka komshini wokuqala wokudlulisa, okushintshelwe kusakhiwo sokudlulisa uketshezi kazibuthe, izinga lokushisa eliphakeme ngeke limise uhlaka olujikelezayo.
4, indawo esebenza kahle yokumboza ￠ 650X1100, ingamukela u-750 X 1250X600 osayizi oweqile nabakhiqizi begiya be-broach ende, enevolumu enkulu kakhulu.
Umshini wokumboza we-cathode ion ongenalutho usetshenziswa kakhulu ekufakweni kwamathuluzi, isikhunta, isikhunta esikhulu sesibuko, isikhunta sepulasitiki, imimese yokuhobha neminye imikhiqizo.
Isikhathi sokuthumela: Nov-07-2022