Ukubhekana nokukhula kwefilimu kunomthelela obaluleke kakhulu. Uma ubulukhuni bomphezulu we-substrate bukhulu, futhi buhlanganiswa kakhulu neziphambeko zomphezulu, kuzothinta ukunamathela kanye nezinga lokukhula kwefilimu. Ngakho-ke, ngaphambi kokuba kuqale ukumbozwa kwe-vacuum, i-substrate izobe isacutshungulwa kusengaphambili, okudlala indima yobulukhuni bomphezulu we-substrate ebusweni be-substrate. Ngemva kokungenelela kwe-ultrasonic, umphezulu we-substrate uzokwakha ukuklwebheka okuncane, okwandisa indawo yokuxhumana yezinhlayiya zefilimu ezincane kanye nomphezulu we-substrate, okungakhulisa kakhulu ukufaneleka kwe-rotor kanye nokuhlanganiswa kwesisekelo se-membrane.
Eziningi zezinto ezisetshenziswa ngaphansi komhlaba, njengoba ubulukhuni be-substrate buncipha, ukunamathela kwefilimu kuyanda, okungukuthi, amandla okubopha isisekelo se-membrane ayaqina; kukhona nezinye izinto ezisetshenziswa ngaphansi komhlaba eziyizimo ezikhethekile, njengokunamathiselwa kwefilimu kwesisekelo se-ceramic. Amadigri anciphile, okungukuthi, amandla okubopha isisekelo se-membrane ayaba buthakathaka.
Ezicini ezithonyayo ezihambisana nefilimu nefilimu, i-thermal bulk coefficient idlala indima ebalulekile. Lapho i-thermal expansion coefficient yefilimu inkulu kune-thermal expansion coefficient ye-matrix, i-torque ayibi, futhi ukucindezeleka okuphezulu kusemngceleni okhululekile. Iseduze nesikhungo sendawo ukuze icindezelwe, futhi ifilimu ingase ibonakale inezingqimba. Thatha ifilimu encane ye-sedimentary Skinus njengesibonelo. Ngenxa yokuthi i-thermal expansion coefficient yedayimane incane, lapho ukufakwa kwesigaba segesi sekuphelile, izinga lokushisa le-substrate liyancishiswa kusuka ekushiseni okuphezulu kwe-sedimentary kuya ekushiseni kwegumbi, futhi ukufinyela kwedayimane kuyancishiswa uma kuqhathaniswa ne-substrate. Ukucindezeleka okukhulu kokushisa kuzokhiqiza ngaphakathi. Lapho i-thermal expansion coefficient yefilimu ingaphansi kwe-heating ledger coefficient ye-substrate, i-torque inhle, futhi ifilimu akulula ukuyibeka.
–Lesi sihloko sikhishwe yi-umenzi womshini wokumboza nge-vacuumI-Guangdong Zhenhua
Isikhathi sokuthunyelwe: Feb-29-2024