Ukujongana nokukhula kwefilimu kunempembelelo ebaluleke kakhulu. Ukuba uburhabaxa bomphezulu we-substrate bukhulu, kwaye budibene ngakumbi neziphene zomphezulu, kuya kuchaphazela ukunamathela kunye nesantya sokukhula kwefilimu. Ke ngoko, ngaphambi kokuba kuqale ukugqunywa kwe-vacuum, i-substrate iya kusetyenzwa kwangaphambili, edlala indima yoburhabaxa bomphezulu we-substrate kumphezulu we-substrate. Emva kokungenelela kwe-ultrasonic, umphezulu we-substrate uya kwenza umkrwelo omncinci, okwandisa indawo yoqhagamshelwano lwee-particles zefilimu ezincinci kunye nomphezulu we-substrate, nto leyo enokunyusa kakhulu ukufaneleka kwe-rotor kunye nokudibanisa isiseko se-membrane.
Kwinkoliso yezinto ezisetyenziswa kwi-substrate, njengoko uburhabaxa be-substrate buncipha, ukunamathela kwefilimu kuyanda, oko kukuthi, amandla okubopha isiseko se-membrane ayaqina; kukwakho nezinye izinto ezisetyenziswa kwi-substrate ezikwimeko ezikhethekileyo, ezifana nokuncamathiselwa kwefilimu kwisiseko se-ceramic. Amanqanaba anciphileyo, oko kukuthi, amandla okubopha isiseko se-membrane ayaba buthathaka.
Kwiimeko ezinefuthe ezifana nefilimu kunye nefilimu, i-thermal bulk coefficient idlala indima ebalulekileyo. Xa i-thermal expansion coefficient yefilimu inkulu kune-thermal expansion coefficient ye-matrix, i-torque ayibi, kwaye uxinzelelo oluphezulu lukwi-free boundary. Ikufutshane nembindi weziko ukuze icinezelwe, kwaye ifilimu inokubonakala ngathi ikwi-layered. Thatha ifilimu encinci ye-sedimentary Skinus njengomzekelo. Ngenxa yokuba i-thermal expansion coefficient yedayimani incinci, xa i-gas phase deposition iphelile, ubushushu be-substrate buyancitshiswa ukusuka kubushushu obuphezulu be-sedimentary ukuya kubushushu begumbi, kwaye ukucutheka kwedayimani kuyancitshiswa xa kuthelekiswa ne-substrate. Uxinzelelo olukhulu lobushushu luya kuvelisa ngaphakathi. Xa i-thermal expansion coefficient yefilimu ingaphantsi kwe-heating ledger coefficient ye-substrate, i-torque iyathandeka, kwaye ifilimu ayilula ukuyibeka kwi-layered.
–Eli nqaku likhutshwe nguumenzi womatshini wokugquma nge-vacuumGuangdong Zhenhua
Ixesha leposi: Feb-29-2024