Mawonekedwe a pamwamba ndi kuchuluka kwa kutentha kwa gawo lapansi pa filimuyi

Kuyang'anizana ndi kukula kwa filimu kumakhala ndi zotsatira zofunika kwambiri. Ngati kukhwima kwa pamwamba pa substrate kuli kwakukulu, ndipo kumaphatikizidwa kwambiri ndi zolakwika za pamwamba, zidzakhudza kulumikizidwa ndi kukula kwa filimuyo. Chifukwa chake, chophimba cha vacuum chisanayambe, substrate idzakhala isanayambe kukonzedwa, zomwe zimagwira ntchito ngati kukhwima kwa pamwamba pa substrate pamwamba pa substrate. Pambuyo pa kulowererapo kwa ultrasound, pamwamba pa substrate padzakhala kukanda pang'ono, komwe kumawonjezera malo olumikizirana ndi tinthu tating'onoting'ono ta filimu ndi pamwamba pa substrate, zomwe zitha kuwonjezera kwambiri kukhazikika kwa rotor ndi kuphatikiza kwa maziko a nembanemba.

Pazinthu zambiri za substrate, pamene kuuma kwa substrate kumachepa, kumatirira kwa filimu kumawonjezeka, ndiko kuti, mphamvu yomangira maziko a nembanemba imakhala yolimba; palinso zinthu zina za substrate zomwe ndi zochitika zapadera, monga kumangirira filimu ya maziko a ceramic. Madigiri otsika, ndiko kuti, mphamvu yomangira maziko a nembanemba imafooka.

Mu zinthu zomwe zimakhudza zomwe zimagwirizana ndi filimu ndi filimu, thermal bulk coefficient imagwira ntchito yofunika kwambiri. Pamene thermal expansion coefficient ya filimuyi ili yaikulu kuposa thermal expansion coefficient ya matrix, torque imakhala yoipa, ndipo mphamvu yayikulu imakhala pa free boundary. Ili pafupi ndi pakati pa pakati kuti ikanganitsidwe, ndipo filimuyo ingawoneke ngati ya zigawo. Tengani sedimentary Skinus thin film mwachitsanzo. Chifukwa thermal expansion coefficient ya diamond ndi yaying'ono, pamene gas phase deposition yatha, kutentha kwa substrate kumachepetsedwa kuchoka pa kutentha kwakukulu kwa sedimentary kupita ku kutentha kwa chipinda, ndipo contraction ya diamondi imachepetsedwa poyerekeza ndi substrate. Kutentha kwakukulu kudzapanga mkati. Pamene thermal expansion coefficient ya filimuyi ili yochepa kuposa heating ledger coefficient ya substrate, torque imakhala yabwino, ndipo filimuyo si yosavuta kuyika.

– Nkhaniyi yatulutsidwa ndiwopanga makina ophikira vacuumGuangdong Zhenhua