Ukuphalaza kwe-Magnetron ikakhulukazi kuhlanganisa ukuthuthwa kwe-plasma yokukhipha, ukuqoshwa kwethagethi, ukufakwa kwefilimu encane kanye nezinye izinqubo, insimu yamagnetic enkambisweni yokuphalaza ye-magnetron izoba nomthelela. Ohlelweni lokuphalaza kwe-magnetron kanye nensimu yamagnetic e-orthogonal, ama-electron angaphansi kwendima yamandla e-Lorentz futhi enza ukunyakaza kwe-spiral trajectory, kumele adlule ekungqubuzaneni okuqhubekayo ukuze ahambe kancane kancane aye ku-anode, ngenxa yokungqubuzana kwenza ingxenye yama-electron ifinyelele ku-anode ngemva kokuba amandla emancane, ukushisa kwe-bombardment ku-substrate nakho akukukhulu. Ngaphezu kwalokho, ngenxa ye-electron ngemikhawulo yensimu yamagnetic eqondiwe, ebusweni bomphumela wamagnetic wesifunda esingaphakathi kwendlela yokukhipha lolu hlu oluncane lwendawo lokuhluzwa kwama-electron luphezulu kakhulu, futhi emphumeleni wamagnetic wesifunda esingaphandle kobuso be-substrate, ikakhulukazi kude nensimu yamagnetic eduze kobuso, ukuhluzwa kwama-electron ngenxa yokusabalala kokusatshalaliswa okuphansi kakhulu nokulinganayo, futhi kuphansi ngisho nakwezimo zokuphalaza kwe-dipole (ngenxa yomehluko wokucindezela kwegesi okusebenza okubili komyalelo wobukhulu). Ubuningi obuphansi bama-electron aqhuma ebusweni be-substrate, ukuze ukuqhuma kwe-substrate okubangelwa ukukhuphuka kwezinga lokushisa eliphansi, okuyindlela eyinhloko yokwenyuka kwezinga lokushisa le-substrate e-magnetron kuphansi. Ngaphezu kwalokho, uma kunensimu kagesi kuphela, ama-electron afinyelela i-anode ngemva kwebanga elifushane kakhulu, futhi amathuba okungqubuzana negesi esebenzayo angama-63.8% kuphela. Futhi engeza insimu yamagnetic, ama-electron enkambisweni yokuthuthela ku-anode ukwenza ukunyakaza okujikelezayo, insimu yamagnetic ibopha futhi yandise umzila wama-electron, okuthuthukisa kakhulu amathuba okungqubuzana kwama-electron namagesi asebenzayo, okukhuthaza kakhulu ukwenzeka kwe-ionization, i-ionization bese iphinda ikhiqize ama-electron futhi ajoyine inqubo yokungqubuzana, amathuba okungqubuzana angandiswa ngama-oda amaningana amakhulu, ukusetshenziswa kahle kwamandla ama-electron, futhi ngaleyo ndlela ekwakhekeni kobuningi obukhulu. Ubuningi be-plasma buyanda ekukhishweni kokukhanya okungavamile kwe-plasma. Izinga lokukhipha ama-athomu kusuka ku-target nalo liyakhuphuka, futhi ukuchitheka okuqondiwe okubangelwa ukuqhunyiswa kwe-target ngama-ion amahle kusebenza kangcono, okuyisizathu sezinga eliphezulu lokufumbeka kwe-magnetron sputtering. Ngaphezu kwalokho, ukuba khona kwensimu yamagnetic kungenza futhi uhlelo lokuchitheka lusebenze ngomfutho womoya ophansi, i-1 ephansi yomfutho womoya ingenza ama-ion esifundeni sengqimba ye-sheath ukunciphisa ukushayisana, ukuqhunyiswa kwe-target ngamandla amakhulu e-kinetic, kanye nosuku lokukwazi ukunciphisa ama-athomu okuqondiwe aqhunyiswayo kanye nokushayisana kwegesi engathathi hlangothi, ukuvimbela ama-athomu okuqondiwe ukuthi ahlakazeke odongeni lwedivayisi noma abuyele emuva endaweni okuqondiwe kuyo, ukuthuthukisa izinga kanye nekhwalithi yokufumbeka kwefilimu encane.
Insimu yamagnetic eqondiwe ingavimbela ngempumelelo indlela yama-electron, okuthi kamuva kuthinte izakhiwo ze-plasma kanye nokuqoshwa kwama-ion ku-target.
Ukulandelela: ukwandisa ukufana kwensimu yamagnetic eqondiwe kungandisa ukufana kokuqoshwa kobuso bethagethi, ngaleyo ndlela kuthuthukiswe ukusetshenziswa kwezinto eziqondiwe; ukusatshalaliswa kwensimu yamagnetic okunengqondo nakho kungathuthukisa ngempumelelo ukuzinza kwenqubo yokubhoboza. Ngakho-ke, ekubhekweni kokubhoboza kwe-magnetron, ubukhulu kanye nokusatshalaliswa kwensimu yamagnetic kubaluleke kakhulu.
–Lesi sihloko sikhishwe yi-umenzi womshini wokumboza nge-vacuumI-Guangdong Zhenhua
Isikhathi sokuthunyelwe: Disemba 14-2023