Ukutshiza ngemagnetron ikakhulu kubandakanya ukuthuthwa kweplasma yokukhupha, ukukrola okujoliswe kuko, ukufakwa kwefilimu encinci kunye nezinye iinkqubo, intsimi yamagnetic kwinkqubo yokutshiza ngemagnetron iya kuba nempembelelo. Kwinkqubo yokutshiza ngemagnetron kunye nentsimi yamagnetic e-orthogonal, ii-electron ziphantsi kwendima yamandla eLorentz kwaye zenza intshukumo ye-spiral trajectory, kufuneka zidlule kwi-collision rhoqo ukuze zihambe kancinci kancinci ziye kwi-anode, ngenxa ye-collision yenza inxalenye yee-electron zifikelele kwi-anode emva kokuba amandla emancinci, ubushushu bokuqhushumba kwi-substrate nako abukhulu. Ukongeza, ngenxa ye-electron yimingcele yentsimi yamagnetic ekujoliswe kuyo, kumphezulu wesiphumo samagnetic sommandla ongaphakathi kwendlela yokukhupha olu luhlu luncinci lwengingqi loxinzelelo lwe-electron luphezulu kakhulu, kwaye kwisiphumo samagnetic sommandla ongaphandle komphezulu we-substrate, ngakumbi kude nentsimi yamagnetic kufutshane nomphezulu, uxinzelelo lwe-electron lubangelwa kukusasazwa kokusasazwa okuphantsi kakhulu nokulinganayo, kwaye luphantsi nakweemeko zokutshiza nge-dipole (ngenxa yomahluko woxinzelelo lwegesi olusebenzayo olufana nobukhulu). Uxinano oluphantsi lwee-elektroni eziqhuma phezu komphezulu we-substrate, ukuze ukuqhuma kwe-substrate okubangelwa kukunyuka kobushushu okuphantsi, okuyindlela ephambili yokunyuka kobushushu be-substrate nge-magnetron kuphantsi. Ukongeza, ukuba kukho intsimi yombane kuphela, ii-elektroni zifikelela kwi-anode emva komgama omfutshane kakhulu, kwaye amathuba okungqubana negesi esebenzayo yi-63.8% kuphela. Kwaye yongeza intsimi yemagnethi, ii-elektroni kwinkqubo yokufudukela kwi-anode ukwenza intshukumo ejikelezayo, intsimi yemagnethi ibopha kwaye yandise indlela yee-elektroni, iphucula kakhulu amathuba okungqubana kwee-elektroni kunye neegesi ezisebenzayo, nto leyo ekhuthaza kakhulu ukwenzeka kwe-ionization, i-ionization kwaye emva koko ivelise ii-elektroni nazo zijoyine inkqubo yokungqubana, amathuba okungqubana anokwandiswa ngemiyalelo emininzi yobukhulu, ukusetyenziswa ngokufanelekileyo kwamandla ee-elektroni, kwaye ngaloo ndlela ekwakhiweni koxinano oluphezulu Uxinano lwe-plasma luyanda ekukhutshweni kokukhanya okungaqhelekanga kwe-plasma. Izinga lokukhupha iiathom kwithagethi nalo liyanda, kwaye ukutshiza okujoliswe kuko okubangelwa kukuqhushumba kwethagethi zii-ions ezilungileyo kusebenza ngakumbi, nto leyo ebangela izinga eliphezulu lokufumba kwe-magnetron. Ukongeza, ubukho be-magnetic field bunokwenza inkqubo yokutshiza isebenze kuxinzelelo lomoya oluphantsi, i-1 ephantsi yoxinzelelo lomoya inokwenza ii-ions kummandla womaleko wesheath ukunciphisa ukungqubana, ukuqhushumba kwethagethi ngamandla amakhulu e-kinetic, kunye nosuku lokuba zikwazi ukunciphisa ii-athom ezijoliswe kuko ezitshiza kunye nokungqubana kwegesi engathathi hlangothi, ukuthintela ii-athom ezijoliswe kuko ukuba zingasasazeki eludongeni lwesixhobo okanye zibuyele kumphezulu wethagethi, ukuphucula izinga kunye nomgangatho wokufumba kwefilimu encinci.
Intsimi yemagnethi ekujoliswe kuyo inokuthintela ngempumelelo indlela yee-elektroni ezihamba ngayo, nto leyo echaphazela iipropati ze-plasma kunye nokugrumba kwee-ions kwindawo ekujoliswe kuyo.
Umkhondo: ukwandisa ukufana kwentsimi yemagnethi ekujoliswe kuyo kunokunyusa ukufana kokukrola komphezulu ekujoliswe kuwo, ngaloo ndlela kuphuculwe ukusetyenziswa kwezinto ekujoliswe kuzo; ukusasazwa kwentsimi ye-electromagnetic okufanelekileyo kunokuphucula ngokufanelekileyo uzinzo lwenkqubo yokutshiza. Ke ngoko, kwithagethi yokutshiza yemagnethi, ubungakanani kunye nokusasazwa kwentsimi yemagnethi kubaluleke kakhulu.
–Eli nqaku likhutshwe nguumenzi womatshini wokugquma nge-vacuumGuangdong Zhenhua
Ixesha lokuthumela: Disemba-14-2023