Basa reMagnetic Field muMagnetron Sputtering

Kupinza magineti kunosanganisira kutakura magineti eplasma, kupinza chinangwa, kuisa magineti muzvikamu zvidiki uye mamwe maitiro, simba remagineti pakushanda kwemagnetron richakanganisa. Muhurongwa hwekushandisa magineti pamwe ne orthogonal magnetic field, magineti anoshandiswa nesimba reLorentz uye anoita kufamba kwe spiral trajectory, anofanira kusangana nekukonana nguva dzose kuti afambe zvishoma nezvishoma kuenda ku anode, nekuda kwekukonana kunoita kuti chikamu chemagineti chisvike ku anode mushure mekunge simba rava diki, kupisa kwebhomba pa substrate hakusi kukuruwo. Pamusoro pezvo, nekuda kwe electron ne target magnetic field limits, pamusoro pechinangwa che magnetic effect yenzvimbo iri mukati me discharge runway iyi nzvimbo diki ye electron concentration yakakwira kwazvo, uye mu magnetic effect yenzvimbo iri kunze kwe substrate surface, kunyanya kure ne magnetic field iri pedyo ne surface, electron concentration nekuda kwekupararira kwekupararira kwakaderera uye kwakaenzana, uye kunyange pasi pe dipole sputtering conditions (nekuda kwemusiyano wekushanda kwegasi mbiri dzehukuru hwakasiyana). Kuwanda kwemaerekitironi ari kuputira pamusoro pesubstrate, zvekuti kuputira kwesubstrate kunokonzerwa nekukwira kwekupisa kwakaderera, inova ndiyo nzira huru yekuwedzera tembiricha yesubstrate, kushoma. Pamusoro pezvo, kana paine munda wemagetsi chete, maerekitironi anosvika paanode mushure mekanguva kapfupi, uye mukana wekusangana negasi riri kushanda i63.8% chete. Uye wedzera munda wemagnetic, maerekitironi ari kufamba kuenda kuanode kuti aite kufamba kwespiral, munda wemagnetic unosunga uye unotambanudza nzira yemaerekitironi, zvichivandudza zvikuru mukana wekusangana kwemaerekitironi nemagasi ari kushanda, izvo zvinokurudzira zvikuru kuitika kweionization, ionization uye zvakare kugadzira maerekitironi zvakare anobatana nemaitiro ekusangana, mukana wekusangana unogona kuwedzerwa nemirairo yakati wandei yehukuru, kushandiswa zvakanaka kwesimba remaerekitironi, uye nekudaro mukuumbwa kwehuwandu hwepamusoro. Kuwanda kweplasma kunowedzera mukubuda kwechiedza chisina kujairika kweplasma. Mwero wekuburitsa maatomu kubva pachinangwa wakawedzerawo, uye kudonha kwechinangwa kunokonzerwa nekuputirwa kwechinangwa nemaion akanaka kunoshanda zvakanyanya, ndicho chikonzero chekuwanda kwekuputirwa kwemagnetron. Pamusoro pezvo, kuvapo kwesimba remagineti kunogonawo kuita kuti sisitimu yekuputira ishande nemhepo yakaderera, 1 yakaderera yekumanikidzwa kwemhepo inogona kugadzira maion munzvimbo yesheath layer kuderedza kupokana, kuputirwa kwechinangwa nesimba rakakura rekinetic, uye zuva rekuti ikwanise kuderedza maatomu akaputirwa uye kupokana kwegasi risina kupindirana, kudzivirira maatomu akaputirwa kuti asapararire kumadziro emudziyo kana kudzoserwa kumashure kune chinangwa, kuvandudza mwero uye kunaka kwekuisa firimu rakatetepa.

Simba remagineti rinonangwa rinogona kudzora nzira yemaerekitironi, izvo zvinokanganisa hunhu hweplasma uye kuchekwa kwemaion pachinangwa.

Trace: kuwedzera kufanana kwesimba remagineti rinotarwa kunogona kuwedzera kufanana kwekucheka kwenzvimbo inotarwa, nokudaro zvichivandudza kushandiswa kwezvinhu zvinotarwa; kugoverwa kwesimba remagineti kunonzwisisika kunogonawo kuvandudza kugadzikana kwemaitiro ekupusha. Saka, kune chinangwa chekupusha chemagnetron, saizi nekupararira kwesimba remagineti kwakakosha zvikuru.

–Chinyorwa ichi chakaburitswa namugadziri wemuchina wevacuum coatingGuangdong Zhenhua