Matsayin Filin Magnetic a cikin Magnetron Sputtering

Fitar da Magnetron ta fi dacewa ta ƙunshi jigilar fitar da jini, ƙwanƙwasa manufa, adana fim ɗin siriri da sauran hanyoyin aiki, filin maganadisu akan tsarin fitar da magnetron zai yi tasiri. A cikin tsarin fitar da magnetron da filin maganadisu na orthogonal, electrons suna ƙarƙashin rawar da ƙarfin Lorentz ke takawa kuma suna yin motsi na karkace, dole ne su fuskanci karo akai-akai don motsawa a hankali zuwa anode, saboda karo yana sa wani ɓangare na electrons ya isa anode bayan kuzarin ya yi ƙarami, zafin jefa bam a kan substrate shi ma ba shi da girma. Bugu da ƙari, saboda electron ta hanyar ƙuntatawa na filin maganadisu na manufa, a cikin saman manufa na tasirin maganadisu na yankin da ke cikin titin fitarwa, wannan ƙaramin kewayon taro na electron na gida yana da yawa sosai, kuma a cikin tasirin maganadisu na yankin da ke wajen saman substrate, musamman nesa da filin maganadisu kusa da saman, yawan electron saboda watsawar rarraba ƙasa da iri ɗaya, har ma ƙasa da yanayin fitar da dipole (saboda bambancin matsin lamba na iskar gas guda biyu na tsari na girma). Ƙananan yawan electrons da ke jefa bom a saman substrate, ta yadda fashewar substrate da ƙarancin zafin jiki ya haifar, wanda shine babban hanyar haɓakar zafin jiki na magnetron sputtering substrate ya yi ƙasa. Bugu da ƙari, idan akwai filin lantarki kawai, electrons ɗin suna isa anode bayan ɗan gajeren nisa, kuma yuwuwar karo da iskar gas mai aiki shine 63.8% kawai. Kuma ƙara filin maganadisu, electrons a cikin tsarin motsawa zuwa anode don yin motsi na karkace, filin maganadisu yana ɗaure kuma yana faɗaɗa hanyar electrons, yana inganta yuwuwar karo na electrons da iskar gas mai aiki sosai, wanda ke haɓaka faruwar ionization, ionization sannan kuma samar da electrons kuma suna shiga cikin tsarin karo, yuwuwar karo na iya ƙaruwa ta hanyar tsari da yawa na girma, ingantaccen amfani da kuzarin electrons, kuma don haka a cikin samuwar babban yawa Yawan plasma yana ƙaruwa a cikin fitar da haske mara kyau na plasma. Yawan fitar da ƙwayoyin zarra daga abin da aka nufa shi ma yana ƙaruwa, kuma fitar da ƙwayoyin zarra daga abin da aka nufa shi ya fi tasiri, wanda shine dalilin yawan ajiyar ƙwayoyin zarra daga magnetron. Bugu da ƙari, kasancewar filin maganadisu na iya sa tsarin sputtering ya yi aiki a ƙarancin matsin iska, ƙarancin 1 don matsin iska na iya yin ions a yankin Layer na sheath don rage karo, jefa bom ɗin da aka nufa da babban kuzarin motsi, da kuma ranar da za a iya rage ƙwayoyin zarra da aka nufa da kuma karo na iskar gas mai tsaka-tsaki, don hana ƙwayoyin zarra da aka nufa su warwatse zuwa bangon na'urar ko kuma su koma saman da aka nufa, don inganta ƙimar da ingancin ajiyar ƙwayoyin zarra.

Filin maganadisu mai manufa zai iya takaita hanyar electrons yadda ya kamata, wanda hakan ke shafar halayen plasma da kuma ƙwanƙwasa ions a kan abin da aka nufa.

Bin diddigi: ƙara daidaiton filin maganadisu na manufa zai iya ƙara daidaiton etching saman manufa, don haka inganta amfani da kayan da aka nufa; rarraba filin lantarki mai ma'ana kuma zai iya inganta daidaiton tsarin sputtering yadda ya kamata. Saboda haka, ga maƙasudin sputtering magnetron, girma da rarraba filin maganadisu suna da matuƙar mahimmanci.

– An fitar da wannan labarin ne dagainjin shafa injin injinGuangdong Zhenhua